KLA Tencor 710-658177-20处理器模块

KLA-Tencor 710-658177-20处理器模块

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 710-658177-20 处理器模块

KLA Tencor 710-658177-20 是一款用于晶圆检测系统中的处理器控制模块，常见于 KLA Tencor 的 2132/2135 系列等表面缺陷检测设备中，主要用于控制扫描系统中 X 轴的移动与同步，是整个图像采集与处理流程中的核心部件之一。

主要功能：

• 控制晶圆平台在 X 轴方向的精准运动；

• 负责实时位置插值计算，实现亚微米级运动控制；

• 与图像采集系统协同运作，保证检测过程同步稳定；

• 执行与运动控制、位置反馈、扫描时序等相关的核心处理任务。

应用领域：

• 半导体制造中的晶圆缺陷检测；

• 光学与电子束图像系统的位置控制；

• 高精度扫描检测平台的核心控制单元；

• KLA Tencor 表面检测系统中的关键运动控制模块。

产品信息：

• 型号：710-658177-20

• 类型：X-Interpolator Phase 3 处理器模块

• 安装位置：位于检测设备主机内部控制区

• 适配系统：如 KLA Tencor 2132 系列 200mm 缺陷检测平台

• 工作方式：与主控制器、编码器接口、运动驱动电路协同运行

英文资料：

KLA Tencor 710-658177-20 processor module

KLA Tencor 710-658177-20 is a processor control module used in wafer inspection systems, commonly found in surface defect detection equipment such as KLA Tencor's 2132/2135 series. It is mainly used to control the movement and synchronization of the X-axis in scanning systems and is one of the core components in the entire image acquisition and processing process.

Main functions:

Control the precise movement of the wafer platform in the X-axis direction;

Responsible for real-time position interpolation calculation and achieving sub micron level motion control;

Collaborate with the image acquisition system to ensure synchronous and stable detection process;

Execute core processing tasks related to motion control, position feedback, scanning timing, etc.

Application areas:

Wafer defect detection in semiconductor manufacturing;

Position control of optical and electron beam imaging systems;

The core control unit of high-precision scanning and detection platform;

The key motion control module in the KLA Tencor surface inspection system.

Product information:

Model: 710-658177-20

Type: X-Interpolator Phase 3 processor module

Installation location: located in the internal control area of the detection device host

Adaptation system: such as KLA Tencor 2132 series 200mm defect detection platform

Working mode: Coordinated operation with the main controller, encoder interface, and motion drive circuit

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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