KLA Tencor 073-805314-00驱动器板

KLA-Tencor  073-805314-00驱动器板

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 073-805314-00 驱动器板 — 产品应用领域详解

一、产品基本信息

KLA Tencor 073-805314-00 驱动器板，也被称为 BCB IIb Board Assembly，是 KLA Tencor 晶圆检测与测试系统（如 P-8 探针台）中常用的电路驱动控制模块。它主要承担电机、定位装置及探测装置的驱动任务，是设备中不可或缺的功能组件。

二、产品应用领域

1. 晶圆测试与探针台系统（Prober Systems）

• 驱动器板用于控制探针系统的精密移动，实现探针与晶圆电极的精准对接，支持高精度电性测试。

• 常应用于 P-8、P-20 等系列探针台中，用于晶圆测试前的自动化定位与对位。

2. 精密电机与多轴系统控制

• 该驱动器板支持多轴联动，能够对多个伺服电机进行同步控制，确保设备在进行晶圆检测时各部件协同工作。

• 提供稳定的速度、加速度控制与位置校准，特别适用于需要高精度重复定位的系统。

3. 图像采集平台运动控制

• 驱动器板也可用于图像识别模块的扫描平台控制，支持高速移动及低抖动控制，确保图像采集数据的清晰与完整。

4. 自动化载具装载系统（Wafer Handling）

• 在设备的晶圆上下料环节中，该驱动板可用于控制真空吸盘、机械手臂、旋转平台等的运动过程，实现快速、稳定的晶圆传输操作。

5. 工业现场可靠性控制

• 驱动器板采用工业级设计标准，具备抗干扰、高温耐受、长期连续运行等特性，能够适应半导体制造环境中粉尘、电磁干扰与温湿度变化的挑战。

英文资料：

KLA Tencor 073-805314-00 Driver Board - Product Application Field Detailed Explanation

1、 Basic Product Information

The KLA Tencor 073-805314-00 driver board, also known as BCB IIb Board Assembly, is a commonly used circuit driver control module in KLA Tencor wafer inspection and testing systems (such as P-8 probe stations). It mainly undertakes the driving tasks of motors, positioning devices, and detection devices, and is an indispensable functional component in the equipment.

2、 Product application areas

1. Wafer Testing and Probe Systems

The driver board is used to control the precise movement of the probe system, achieve precise docking between the probe and the wafer electrode, and support high-precision electrical testing.

Commonly used in probe stations such as P-8 and P-20 series for automated positioning and alignment before wafer testing.

2. Precision motors and multi axis system control

This driver board supports multi axis linkage and can synchronously control multiple servo motors to ensure that all components work together during wafer inspection.

Provide stable speed, acceleration control, and position calibration, especially suitable for systems that require high-precision repetitive positioning.

3. Motion control of image acquisition platform

The driver board can also be used for scanning platform control of image recognition modules, supporting high-speed movement and low shake control to ensure clear and complete image acquisition data.

4. Automated Vehicle Loading System (Wafer Handling)

In the wafer loading and unloading process of the equipment, this drive board can be used to control the movement process of vacuum suction cups, robotic arms, rotating platforms, etc., achieving fast and stable wafer transfer operations.

5. Industrial site reliability control

The driver board adopts industrial grade design standards and has characteristics such as anti-interference, high temperature tolerance, and long-term continuous operation, which can adapt to the challenges of dust, electromagnetic interference, and temperature and humidity changes in the semiconductor manufacturing environment.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218