Novellus Systems 02-408298-00控制器
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 02-408298-00 控制器 是 Novellus 半导体设备中的核心控制模块，负责设备工艺流程的自动化管理和协调。该控制器承担信号采集、处理和控制指令下达等关键任务，确保设备按照预定工艺参数稳定运行。
Novellus Systems 02-408298-00 控制器的产品应用领域：
工艺流程自动化控制
控制CVD、PVD、ALD等半导体制造工艺的关键参数，如温度、压力、气体流量等。多信号输入输出管理
采集传感器数据，处理模拟量和数字量信号，并向执行机构发送控制命令。设备安全联锁支持
与联锁模块协作，监测设备安全状态，防止异常工况发生。设备状态监控与报警
实时监控设备运行状况，异常时触发报警，辅助维护与故障诊断。通信与系统集成
通过通信接口与其他控制模块、I/O模块及上位系统实现数据交换和协同控制。适配多种Novellus设备平台
广泛应用于Concept、ALTUS、INOVA等设备。
英文资料：
The Novellus Systems 02-408298-00 controller is the core control module in Novellus semiconductor equipment, responsible for the automation management and coordination of equipment process flow. This controller is responsible for key tasks such as signal acquisition, processing, and issuing control instructions to ensure stable operation of the equipment according to predetermined process parameters.
Application areas of Novellus Systems 02-408298-00 controller:
Process automation control
Control key parameters of semiconductor manufacturing processes such as CVD, PVD, ALD, such as temperature, pressure, gas flow rate, etc.
Multi signal input/output management
Collect sensor data, process analog and digital signals, and send control commands to the executing mechanism.
Equipment safety interlock support
Collaborate with interlocking modules to monitor equipment safety status and prevent abnormal operating conditions from occurring.
Equipment status monitoring and alarm
Real time monitoring of equipment operation status, triggering alarms in case of abnormalities, assisting in maintenance and fault diagnosis.
Communication and System Integration
Realize data exchange and collaborative control with other control modules, I/O modules, and upper level systems through communication interfaces.
Adapt to multiple Novellus device platforms
Widely used in devices such as Concept, ALTUS, INOVA, etc.
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
