TEL Tokyo Electron 3281-000110-13照明控制板
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3281-000110-13 照明控制板（Lighting Control Board） 是专用于半导体制造设备中的一种电子控制组件，主要功能是对照明系统进行精准控制、调光管理及状态反馈，广泛用于晶圆处理设备中的检测照明、对准灯源、腔体内部观察灯等应用场景。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品型号 | 3281-000110-13 |
| 产品名称 | 照明控制板（Lighting Control Board） |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 功能类型 | 灯源电源控制 / 调光驱动模块 |
二、主要功能
| 功能类别 | 描述 |
|---|---|
| 照明电源控制 | 控制照明灯的开关、稳压、定时运行等操作。 |
| 亮度调节 | 实现照明亮度的精准调节（PWM或DAC方式），适应不同检测需求。 |
| 状态反馈 | 提供照明状态信号（开/关/故障）返回给主控制系统。 |
| 过载保护 | 对灯源过流、过温等情况提供自动保护。 |
三、典型应用领域
3281-000110-13 照明控制板主要用于 TEL 以下设备系统中：
1. 晶圆对准与检测系统
控制显影前后的检测照明；
为对准摄像头（Aligner）提供稳定照明源。
2. 晶圆搬运腔体内部
在真空或载片腔体内部提供观测灯源；
启动/关闭由操作系统远程控制。
3. 光刻和显影设备照明控制
控制光刻区域辅助灯；
设备维护状态下辅助人员观察。
4. 设备面板与状态指示灯
也可能控制设备面板上的工作状态指示照明（红绿黄灯、报警灯）。
英文资料：
TEL Tokyo Electron 3281-0001110-13 Lighting Control Board is an electronic control component specifically designed for semiconductor manufacturing equipment. Its main functions include precise control, dimming management, and status feedback of the lighting system. It is widely used in applications such as detection lighting, alignment light sources, and internal observation lights in wafer processing equipment.
1、 Basic Product Information
Project Content
Product model 3281-000110-13
Product Name: Lighting Control Board
Manufacturer Tokyo Electron Ltd. (TEL)
Function type: Light source power control/dimming driver module
2、 Main functions
Functional category description
Lighting power control controls the switching, voltage stabilization, and timed operation of lighting fixtures.
Brightness adjustment achieves precise adjustment of lighting brightness (PWM or DAC mode) to meet different detection needs.
Status feedback provides lighting status signals (on/off/fault) back to the main control system.
Overload protection provides automatic protection for situations such as overcurrent and overheating of the light source.
3、 Typical application areas
The lighting control board 3281-000110-13 is mainly used in the following TEL equipment systems:
1. Wafer Alignment and Inspection System
Control the detection lighting before and after development;
To provide a stable illumination source for aligning the camera.
2. Inside the wafer handling chamber
Provide an observation light source inside the vacuum or wafer cavity;
Startup/shutdown is remotely controlled by the operating system.
3. Lighting control of lithography and development equipment
Control the auxiliary lights in the lithography area;
Auxiliary personnel observe during equipment maintenance.
4. Equipment panel and status indicator lights
It is also possible to control the working status indicator lighting (red, green, yellow lights, alarm lights) on the device panel.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
