TEL Tokyo Electron 2180-020932-11电源单元

TEL Tokyo Electron  2180-020932-11电源单元

1.产 品 资 料 介 绍：

中文资料：

• 半导体制造设备控制系统：为设备主控制器和各功能模块稳定供电，保证整个系统高效运行。

• 气体供应系统：支持质量流量控制器（MFC）、阀门驱动和传感器的电源需求。

• 真空系统：为真空泵、真空传感器和相关控制单元提供稳定电源，确保腔体压力精准控制。

• 温度控制系统：为加热器、冷却器及温度传感器模块提供可靠电源，保证温度调节精确稳定。

• 自动化搬运系统：驱动机械臂、电机及传感器，支持晶圆自动搬运和定位操作。

• 安全联锁系统：为安全传感器和联锁装置提供电力支持，保障设备和操作人员安全。

• 光学检测系统：为光学传感器和检测模块供电，保障成像和检测的稳定性。

• 辅助设备：支持设备内部辅助电机、风扇及泵浦的运行电源。

• 洁净室环境应用：设计满足洁净室规范，适应高洁净度生产环境中的电源需求。

英文资料：

Semiconductor manufacturing equipment control system: provides stable power supply for the main controller and various functional modules of the equipment, ensuring efficient operation of the entire system.

Gas supply system: supports power requirements for mass flow controllers (MFCs), valve drives, and sensors.

Vacuum system: provides stable power supply for vacuum pumps, vacuum sensors, and related control units to ensure precise control of chamber pressure.

Temperature control system: provides reliable power supply for heaters, coolers, and temperature sensor modules to ensure precise and stable temperature regulation.

Automated handling system: drives robotic arms, motors, and sensors to support automatic wafer handling and positioning operations.

Safety interlock system: provides electrical support for safety sensors and interlock devices to ensure the safety of equipment and operators.

Optical detection system: Provides power to optical sensors and detection modules to ensure the stability of imaging and detection.

Auxiliary equipment: Supports the operation power supply of internal auxiliary motors, fans, and pumps.

Application of cleanroom environment: Designed to meet cleanroom standards and adapt to power requirements in high cleanliness production environments.

2.产      品      展      示      

3.其他产品

GE  IS420PUAAH1A  以太网交换机

ABSOLUTE PROCESS API4380GD隔离变送器

IS215UCCCM04AB 控制器板

4.其他英文产品

REXROTH PPC-R22.1N-T-NN-P1-NN-FW servo

DELTA TAU ACC-24E2 interface simulation

ALSTOM 3EST125-975 DCC2382A Control Pane

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218