TEL Tokyo Electron 3M08-027471-11接口模块
1.产 品 资 料 介 绍：
中文资料：
产品名称：TEL Tokyo Electron 3M08-027471-11 接口模块
设备类型：接口控制模块 / I/O 模块
制造商：Tokyo Electron Ltd.（日本东京电子）
一、主要应用领域
半导体制造设备
应用于Tokyo Electron的前段制程设备，例如：
蚀刻设备（Etcher）
化学气相沉积设备（CVD）
原子层沉积设备（ALD）
模块用作控制系统和传感器、执行机构之间的信号交互接口。
自动化控制系统
控制气阀、泵浦、加热器、冷却器等装置的启停状态。
实现设备联锁逻辑管理和安全控制。
I/O 信号处理
处理外部输入/输出数字信号与模拟信号。
连接 PLC、主控板卡，实现工艺状态监控与响应。
晶圆搬运系统（EFEM/FOUP Interface）
管理晶圆在设备间的自动传输过程。
接收来自晶圆传送系统的状态信号。
洁净室设备接口
用于洁净室中设备对设备的标准化接口连接，确保通讯和运行同步。
二、典型功能概述
数字/模拟输入输出接口
电气隔离与保护功能
通信协议支持（如 TEL 专有接口、RS232/422/485）
故障检测与状态指示功能
可热插拔或便于维护的 PCB 架构
英文资料：
Product Name: TEL Tokyo Electron 3M08-027471-11 Interface Module
Equipment type: Interface control module/I/O module
Manufacturer: Tokyo Electron Ltd
1、 Main application areas
Semiconductor Manufacturing Equipment
Applied to the front-end process equipment of Tokyo Electron, such as:
Etcher equipment
Chemical Vapor Deposition Equipment (CVD)
Atomic layer deposition equipment (ALD)
Modules are used as signal interaction interfaces between control systems, sensors, and actuators.
automatic control system
Control the start and stop status of devices such as air valves, pumps, heaters, and coolers.
Implement equipment interlocking logic management and safety control.
I/O signal processing
Process external input/output digital and analog signals.
Connect PLC and main control board to achieve process status monitoring and response.
Wafer Handling System (EFEM/FOUP Interface)
Manage the automatic transfer process of wafers between devices.
Receive status signals from the wafer transfer system.
Clean room equipment interface
Used for standardized interface connections between equipment in clean rooms to ensure communication and synchronous operation.
2、 Typical Function Overview
Digital/Analog Input/Output Interface
Electrical isolation and protection function
Communication protocol support (such as TEL proprietary interfaces RS232/422/485）
Fault detection and status indication function
PCB architecture that is hot swappable or easy to maintain
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB 70BK03c-E Control I/O Module
| PCE845-XYZ-A | AMAT 0100-03378 | MC-TAIH14 |
| PCE843-001-T | AMAT 0100-20335 | MC-TAIH13 |
| PCE843-001-N | 6134-6SC71-7 | MC-TAIH12 |
| PCE843-001-F | 6SC6620-0AA01 | MC-TAIH04 |
| PCE843-001-A |  6SC6100-0GC10 | MC-TAIH23 |
| PCE835-XYZ-T | 6SC6103-0SE31 | MC-TAIH52 |
| PCE835-XYZ-N | 6SC6100-0GE01 | MC-TAIH53 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
