TEL Tokyo Electron EC81-000007-11控制单元模块

TEL Tokyo Electron  EC81-000007-11控制单元模块

1.产 品 资 料 介 绍：

中文资料：

产品名称：EC81-000007-11 控制单元模块
别名：TEB405-1/FD2 控制电路板
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制逻辑模块 / 控制核心 PCB

一、产品功能说明

该模块是一块集成控制功能的电路板，用于 Tokyo Electron 半导体设备中的核心控制系统。其功能主要集中在以下几个方面：

1. 中央控制处理

   • 作为主控系统的一部分，协调设备中各个部件（例如气阀、真空泵、加热器等）的启停逻辑。

   • 执行设定的控制程序，包括工艺参数设定、状态切换及报警联锁逻辑。

2. 信号中枢转发

   • 接收上位机（主机）或操作面板的指令信号，并将其转换为设备内部控制信号。

   • 通过系统总线或串行通信协议与其他控制模块协同工作。

3. 设备运行状态监控

   • 实时采集各个接口模块或传感器的状态，反馈至主控系统。

   • 支持模块级故障检测、自检功能。

二、典型应用领域

1. 东京电子 UNITY II 系列蚀刻设备

   • 在该系列中作为核心控制模块，承担整个设备的流程控制功能。

   • 控制真空腔室、等离子体系统、冷却系统等关键单元。

2. TEL 晶圆处理设备

   • 可用于 CVD、ALD、后处理设备中作控制主板使用。

3. 工艺控制中心逻辑板

   • 适用于精密工艺设备中控制时序、保护逻辑、通信交换等核心操作。

英文资料：

Product Name: EC81-000007-11 Control Unit Module

Alias: TEB405-1/FD2 Control Circuit Board

Manufacturer: Tokyo Electron Ltd

Product Type: Control Logic Module/Control Core PCB

1、 Product Function Description

This module is a circuit board with integrated control functions, used for the core control system in Tokyo Electron semiconductor equipment. Its functions mainly focus on the following aspects:

Central Control Processing

As part of the main control system, coordinate the start stop logic of various components in the equipment, such as air valves, vacuum pumps, heaters, etc.

Execute the set control program, including process parameter setting, state switching, and alarm interlock logic.

Signal center forwarding

Receive command signals from the upper computer (host) or operation panel and convert them into internal control signals of the device.

Collaborate with other control modules through system bus or serial communication protocol.

Equipment operation status monitoring

Real time collection of the status of various interface modules or sensors, and feedback to the main control system.

Support module level fault detection and self checking functions.

2、 Typical application areas

Tokyo Electronics UNITY II series etching equipment

As the core control module in this series, it undertakes the process control function of the entire device.

Control key units such as vacuum chambers, plasma systems, cooling systems, etc.

TEL wafer processing equipment

Can be used as a control board in CVD, ALD, and post-processing equipment.

Process Control Center Logic Board

Suitable for core operations such as control timing, protection logic, and communication exchange in precision process equipment.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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