TEL Tokyo Electron 2L80-002259-11温度控制单元
1.产 品 资 料 介 绍：
中文资料：
产品名称：TEL Tokyo Electron 2L80-002259-11 温度控制单元
设备类型：温度控制单元
制造商：Tokyo Electron Ltd.（日本东京电子）
一、主要应用领域
半导体制造设备
主要用于Tokyo Electron的清洗、涂胶、光刻等工艺设备。
温度控制
实现设备关键部件的温度控制，防止过热或温度异常。
设备保护
协助控制温度传感器、加热器等执行机构的安全联动。
二、典型功能概述
温度监测与调节
温度异常报警
加热器控制
温度传感器接口
设备温度保护
模块化设计，便于维护
三、适配系统或产品系列（示例）
Tokyo Electron Clean Track系列
Tokyo Electron涂胶与光刻设备
其他需温度控制的半导体工艺设备
英文资料：
Product Name: TEL Tokyo Electron 2L80-002259-11 Temperature Control Unit
Equipment type: Temperature control unit
Manufacturer: Tokyo Electron Ltd
1、 Main application areas
Semiconductor Manufacturing Equipment
Mainly used for cleaning, coating, photolithography and other process equipment of Tokyo Electron.
temperature control
Implement temperature control of key components of the equipment to prevent overheating or abnormal temperature.
equipment protection
Assist in controlling the safety linkage of temperature sensors, heaters, and other actuators.
2、 Typical Function Overview
Temperature monitoring and regulation
Abnormal temperature alarm
heater control
Temperature sensor interface
Equipment temperature protection
Modular design for easy maintenance
3、 Adaptation system or product series (example)
Tokyo Electron Clean Track Series
Tokyo Electron Coating and Photolithography Equipment
Other semiconductor process equipment requiring temperature control
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
