TEL Tokyo Electron 381-600196-7控制单元

TEL Tokyo Electron  381-600196-7控制单元

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 381-600196-7 控制单元 – 产品应用领域

1. 废气处理系统（Scrubber）控制
该控制单元用于TEL半导体设备中的废气净化系统，用于控制化学气体处理过程，包括泵、阀门、风机等装置的启停和调节，保障工艺废气的有效排放与净化。

2. 工艺环境安全保障
通过监测气体流量、压力、温度等参数，及时发现异常，触发安全联锁机制，防止有害气体泄漏，对保障洁净室和人员安全至关重要。

3. 与主控系统集成运行
该模块作为I/O接口控制板，与TEL主控制系统协同，确保废气处理系统与主设备同步工作，实现联动控制与异常反馈。

4. 自动化运行与维护支持
实现Scrubber系统的自动启停、故障报警、状态监控等功能，提升系统自动化水平，支持远程监测与维护策略优化。

5. 环境合规与绿色制造
控制单元有助于确保废气处理符合环保法规要求，是TEL设备符合ISO、RoHS、SEMI等国际标准的重要组件，广泛应用于绿色生产流程中。

英文资料：

TEL Tokyo Electron 381-600196-7 Control Unit - Product Application Fields

1. Control of exhaust gas treatment system (scrubber)

This control unit is used in the exhaust gas purification system of TEL semiconductor equipment to control the chemical gas treatment process, including the start stop and adjustment of pumps, valves, fans and other devices, to ensure the effective discharge and purification of process exhaust gas.

2. Safety guarantee of process environment

By monitoring parameters such as gas flow rate, pressure, and temperature, abnormalities can be detected in a timely manner, triggering safety interlock mechanisms to prevent harmful gas leaks, which is crucial for ensuring the safety of clean rooms and personnel.

3. Integrate with the main control system for operation

This module serves as an I/O interface control board and collaborates with the TEL main control system to ensure that the exhaust gas treatment system works synchronously with the main equipment, achieving linkage control and abnormal feedback.

4. Automated operation and maintenance support

Implement automatic start stop, fault alarm, status monitoring and other functions of the Scrubber system, improve the automation level of the system, and support remote monitoring and maintenance strategy optimization.

5. Environmental compliance and green manufacturing

The control unit helps ensure that exhaust gas treatment complies with environmental regulations and is an important component of TEL equipment that meets international standards such as ISO, RoHS, SEMI, and is widely used in green production processes.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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