TEL Tokyo Electron 1D81-000104接口 PCB 板

TEL Tokyo Electron   1D81-000104接口 PCB 板

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 1D81-000104 接口 PCB 板
类型：接口印刷电路板（Interface Printed Circuit Board）
制造商：Tokyo Electron Ltd.（TEL）

一、产品功能概述

该板卡属于 TEL 半导体设备中的标准化电子接口模块，用于设备内部控制信号、电源信号、模拟/数字信号的接入与转发，是系统中执行控制逻辑的中继节点之一。主要功能包括：

• 提供设备内各模块（如传感器、驱动器、执行器等）之间的电气接口

• 支持多通道信号传输：如 I/O 数字信号、模拟信号、电源信号等

• 实现不同设备模块之间的信号调节、转换与隔离

• 支持对信号的逻辑判断、滤波、稳压等处理

二、典型应用领域

1. Etch/CVD/ALD 等主工艺腔体控制系统

• 接收主控板（如 CPU 板或工艺控制器）的指令

• 将控制信号传输到加热器、阀门、气体流量控制器（MFC）等设备

• 回传工艺腔体内温度、气压、位置等传感器数据

2. 晶圆传输系统（Loadlock/Transfer Module）

• 管理机械手、电机驱动器、位置检测传感器、气动元件等设备间的信号通信

• 协助完成晶圆装载、传送、对位等动作流程

3. 电源与接地分配系统

• 提供电源输入通道，带有保护、滤波及过载防护

• 将稳定电源送入多个子模块（驱动板、控制板、信号板等）

4. 设备互锁与安全系统

• 接入限位开关、安全门传感器、急停开关等信号

• 与设备联锁逻辑系统配合，保障设备在异常时自动停机或进入保护状态

英文资料：

TEL Tokyo Electron 1D81-000104 Interface PCB Board

Type: Interface Printed Circuit Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This board belongs to the standardized electronic interface module in TEL semiconductor equipment, which is used for the access and forwarding of internal control signals, power signals, and analog/digital signals in the equipment. It is one of the relay nodes that executes control logic in the system. The main functions include:

Provide electrical interfaces between various modules within the device, such as sensors, drivers, actuators, etc

Support multi-channel signal transmission: such as I/O digital signals, analog signals, power signals, etc

Realize signal conditioning, conversion, and isolation between different device modules

Support logical judgment, filtering, voltage stabilization and other processing of signals

2、 Typical application areas

1. Etch/CVD/ALD and other main process chamber control systems

Receive instructions from the main control board (such as CPU board or process controller)

Transmit control signals to devices such as heaters, valves, and gas flow controllers (MFCs)

Return sensor data such as temperature, air pressure, and position inside the process chamber

2. Wafer Transfer System (Loadlock/Transfer Module)

Manage signal communication between equipment such as robotic arms, motor drivers, position detection sensors, and pneumatic components

Assist in completing wafer loading, transportation, alignment and other operational processes

3. Power and grounding distribution system

Provide power input channels with protection, filtering, and overload protection

Send stable power to multiple sub modules (driver board, control board, signal board, etc.)

4. Equipment Interlocking and Security System

Connect signals such as limit switches, safety door sensors, emergency stop switches, etc

Cooperate with the equipment interlocking logic system to ensure that the equipment automatically shuts down or enters a protective state in case of abnormalities

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218