TEL Tokyo Electron 1B80-002822-11控制板
1.产 品 资 料 介 绍：
中文资料：
产品型号：TEL Tokyo Electron 1B80-002822-11
产品类型：控制板（Control PCB）
制造商：Tokyo Electron Ltd.（TEL）
一、功能概述
该控制板用于TEL半导体制造设备中，主要承担以下功能：
管理本地设备单元的运行（如阀门、加热器、泵等）
接收主控系统指令，输出控制信号
采集传感器数据并反馈至主控系统
执行联锁保护和流程逻辑控制
可能包括模拟与数字信号接口
二、典型应用领域
刻蚀系统（Etcher）
控制真空阀门、RF 电源、气体流量等工艺关键单元。薄膜沉积系统（CVD/ALD）
管理温度控制、气体混合与阀门驱动逻辑。晶圆传输系统（Loadlock、Transfer Arm）
控制机械臂、位置传感器、门禁系统动作。清洗系统或烘干模块
控制液体输送、电磁阀及温控单元。
三、技术特性（常见）
多通道输入输出接口（数字/模拟）
通讯接口：TTL、RS485 或专用总线
可能内含 MCU 或逻辑控制芯片
信号隔离与滤波功能
与 TEL 控制主板、继电器板等配套使用
英文资料：
Product model: TEL Tokyo Electron 1B80-002822-11
Product type: Control PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Function Overview
This control board is used in TEL semiconductor manufacturing equipment and mainly undertakes the following functions:
Manage the operation of local device units (such as valves, heaters, pumps, etc.)
Receive instructions from the main control system and output control signals
Collect sensor data and provide feedback to the main control system
Implement interlocking protection and process logic control
May include analog and digital signal interfaces
2、 Typical application areas
Etcher system
Control key process units such as vacuum valves, RF power supplies, and gas flow rates.
Thin film deposition system (CVD/ALD)
Manage temperature control, gas mixing, and valve drive logic.
Wafer Transfer System (Loadlock, Transfer Arm)
Control the actions of the robotic arm, position sensor, and access control system.
Cleaning system or drying module
Control liquid delivery, solenoid valves, and temperature control units.
3、 Technical characteristics (common)
Multi channel input/output interface (digital/analog)
Communication interface: TTL, RS485 or dedicated bus
May contain MCU or logic control chip
Signal isolation and filtering function
Used in conjunction with TEL control motherboard, relay board, etc
2.产 品 展 示
3.其他产品
Bachmann IPC1412 FRE CM1G1 1G CF8G XPE通信处理器
4.其他英文产品
Radisys ATCA-PP81 controller module
AMAT 0190-24282 encoder module
IC3600EPSS1B power supply boar
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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