TEL Tokyo Electron 3281-000036-12电路板
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 3281-000036-12 电路板
类别:功能控制电路板 / PCB
制造商:Tokyo Electron Ltd.(TEL)
一、产品功能概述
该电路板是TEL半导体设备中的关键电子模块,主要负责:
连接和管理设备内部各种电子信号
支持传感器信号采集与处理
控制执行机构的驱动信号输出
作为系统内多种子模块的接口枢纽
二、典型应用领域
气体控制系统:用于控制气体流量、阀门开关和压力调节
真空系统:管理真空泵、阀门及压力传感器信号
晶圆搬运模块:支持机械手、电机控制与位置反馈
工艺控制子系统:处理温度、压力等工艺参数信号
三、技术特性(参考)
多层PCB设计,提升信号完整性与抗干扰能力
集成数字及模拟信号接口
工业级连接器与元器件,适应洁净室环境
支持与主控制器、继电器板、驱动板等配合使用
英文资料:
TEL Tokyo Electron 3281-000036-12 Circuit Board
Category: Function Control Circuit Board/PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This circuit board is a key electronic module in TEL semiconductor equipment, mainly responsible for:
Connect and manage various electronic signals inside the device
Support sensor signal acquisition and processing
Drive signal output for controlling the actuator
As an interface hub for multiple submodules within the system
2、 Typical application areas
Gas control system: used to control gas flow, valve opening and closing, and pressure regulation
Vacuum System: Manage signals from vacuum pumps, valves, and pressure sensors
Wafer handling module: supports robotic arm, motor control, and position feedback
Process control subsystem: processes process parameter signals such as temperature and pressure
3、 Technical characteristics (reference)
Multi layer PCB design enhances signal integrity and anti-interference capability
Integrated digital and analog signal interface
Industrial grade connectors and components, suitable for cleanroom environments
Support for use in conjunction with main controllers, relay boards, driver boards, etc
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218