TEL Tokyo Electron 3281-000080-13输入/输出板

TEL Tokyo Electron 3281-000080-13输入/输出板

1.产 品 资 料 介 绍：

中文资料：

一、功能概述

该 I/O 板为 TEL 半导体设备中常见的控制接口部件，主要功能包括：

• 实现设备控制系统中 数字和/或模拟信号的输入与输出处理

• 作为信号中继桥梁连接主控单元与各类传感器、执行器

• 提供 信号隔离、电平匹配、状态指示 等关键功能

• 支持联锁逻辑、报警触发、控制执行等任务

二、典型应用领域

该板卡通常用于 TEL 设备的以下子系统中：

1. 气体/液体控制系统

• 输入：采集气体流量计、压力传感器、液位传感器的信号

• 输出：驱动电磁阀、泵、电加热单元等设备

2. 真空腔体/Loadlock 系统

• 处理真空压力开关、门体开关、腔体温控元件的信号

• 管理腔体内气体控制元件与安全联锁机制

3. 晶圆搬运模块（Transfer）

• 接入机械臂位置传感器、限位开关、编码器等信号

• 控制升降装置、旋转平台、搬运驱动马达等部件

4. 清洗/烘干/辅助模块

• 控制液体喷淋、风扇、干燥电加热器等辅助工艺装置

• 实时采集状态反馈，用于工艺状态确认

英文资料：

1、 Function Overview

This I/O board is a common control interface component in TEL semiconductor equipment, and its main functions include:

Implement input and output processing of digital and/or analog signals in equipment control systems

As a signal relay bridge connecting the main control unit with various sensors and actuators

Provide key functions such as signal isolation, level matching, and status indication

Support tasks such as interlocking logic, alarm triggering, and control execution

2、 Typical application areas

This board is typically used in the following subsystems of TEL equipment:

1. Gas/liquid control system

Input: Collect signals from gas flow meters, pressure sensors, and liquid level sensors

Output: Drive electromagnetic valves, pumps, electric heating units and other equipment

2. Vacuum chamber/Loadlock system

Processing signals from vacuum pressure switches, door switches, and chamber temperature control components

Manage gas control components and safety interlock mechanisms inside the chamber

3. Wafer Transfer Module

Connect signals from robotic arm position sensors, limit switches, encoders, etc

Control the lifting device, rotating platform, handling drive motor and other components

4. Cleaning/drying/auxiliary modules

Control auxiliary process equipment such as liquid spray, fan, and drying electric heater

Real time collection of status feedback for process status confirmation

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218