TEL Tokyo Electron SSMC-8B381-639输入输出模块
1.产 品 资 料 介 绍:
中文资料:
一、基本信息
产品型号:SSMC-8B381-639
产品名称:输入输出模块(I/O Module)
制造商:TEL(Tokyo Electron Limited)
模块类型:数字/模拟输入输出接口模块
应用领域:半导体制造设备的信号采集与控制
二、主要功能
数字输入:采集传感器、开关、接近传感器等数字信号状态
数字输出:控制执行器、继电器、电磁阀、指示灯等开关状态
模拟信号接口:支持部分模拟量信号输入与输出(视具体配置)
信号隔离与放大:保障信号质量,防止干扰与误动作
通信接口:与主控制系统交换信号,实现协调控制
三、应用领域
光刻前后处理系统
蚀刻与薄膜沉积设备
真空与搬运控制系统
气体与流量控制子系统
四、模块特点
高度集成,适合复杂工艺的多通道信号控制
支持工业级环境,防静电、防干扰设计
兼容 TEL 专用通信协议和设备控制架构
版本特定,保证与设备系统的高兼容性和稳定性
英文资料:
1、 Basic Information
Product model: SSMC-8B381-639
Product Name: I/O Module
Manufacturer: TEL (Tokyo Electron Limited)
Module Type: Digital/Analog Input/Output Interface Module
Application field: Signal acquisition and control of semiconductor manufacturing equipment
2、 Main functions
Digital input: Collecting digital signal status of sensors, switches, proximity sensors, etc
Digital output: Control the switch status of actuators, relays, solenoid valves, indicator lights, etc
Analog signal interface: supports partial analog signal input and output (depending on specific configuration)
Signal isolation and amplification: ensuring signal quality, preventing interference and misoperation
Communication interface: exchange signals with the main control system to achieve coordinated control
3、 Application Fields
Photolithography pre-processing and post-processing system
Etching and thin film deposition equipment
Vacuum and handling control system
Gas and Flow Control Subsystem
4、 Module features
Highly integrated, suitable for multi-channel signal control in complex processes
Support industrial grade environment, anti-static and anti-interference design
Compatible with TEL dedicated communication protocol and device control architecture
Version specific, ensuring high compatibility and stability with device systems
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218