TEL Tokyo Electron 3M81-025137-21输入输出模块
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-025137-21 输入输出模块（I/O Module） 是一款用于半导体设备中信号传输与控制的关键电子模块。它主要用于采集外部信号并将控制命令输出到各个执行装置，实现设备各部分之间的数据交互与自动化控制。
一、基本信息
模块名称：输入输出模块（Input/Output Module）
产品型号：3M81-025137-21
制造商：Tokyo Electron Ltd.（TEL）
模块类别：I/O接口类控制板卡
应用对象：半导体工艺设备（Etcher、CVD、Cleaner、Coater/Developer 等）
二、主要功能
输入功能
接收外部设备（传感器、开关、检测器等）的数字或模拟信号；
用于监测工艺状态、门控状态、温度/压力报警等。
输出功能
向执行单元（如电磁阀、继电器、指示灯、加热器控制单元）发送控制命令；
控制各设备动作的启动、停止或联锁执行。
信号转换与隔离
实现TTL、电流环、光电隔离等接口标准之间的兼容；
保证数据传输安全、抗干扰能力强。
与主控系统通信
与TEL主控系统（如PLC、IPC或嵌入式控制器）进行数据通信与指令交换；
支持系统联动与自动流程控制。
英文资料：
The TEL Tokyo Electron 3M81-025137-21 Input/Output Module (I/O Module) is a critical electronic module used for signal transmission and control in semiconductor devices. It is mainly used to collect external signals and output control commands to various execution devices, realizing data exchange and automation control between different parts of the equipment.
1、 Basic Information
Module Name: Input/Output Module
Product model: 3M81-025137-21
Manufacturer: Tokyo Electron Ltd. (TEL)
Module category: I/O interface control board
Application objects: Semiconductor process equipment (Etcher, CVD, Cleaner, Coater/Developer, etc.)
2、 Main functions
Input function
Receive digital or analog signals from external devices such as sensors, switches, detectors, etc;
Used for monitoring process status, gate control status, temperature/pressure alarms, etc.
output function
Send control commands to execution units (such as solenoid valves, relays, indicator lights, heater control units);
Control the start, stop, or interlock execution of various device actions.
Signal conversion and isolation
Realize compatibility between interface standards such as TTL, current loop, and optoelectronic isolation;
Ensure data transmission security and strong anti-interference ability.
Communicate with the main control system
Data communication and instruction exchange with TEL main control systems (such as PLC, IPC, or embedded controllers);
Support system linkage and automatic process control.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
