TEL Tokyo Electron 3D81-000020-14印刷电路板
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000020-14 印刷电路板（PCB，Printed Circuit Board） 是一块用于半导体制造设备中的专用电子控制板。此电路板主要承担信号处理、设备控制、数据通信或接口中继等任务，在TEL的多种核心设备系统中扮演着重要角色。
一、基本信息
产品名称：印刷电路板 / 控制板
产品型号：3D81-000020-14
制造商：Tokyo Electron Ltd.（TEL）
功能类型：控制、通信或接口处理类 PCB
应用位置：嵌入在TEL设备的主控制系统、电气柜或子系统接口单元中
二、核心功能（视具体配置而定）
信号调理与处理
对输入信号（模拟/数字）进行采样、放大、滤波等前端处理。
接口中继
在主控制器与执行器、传感器之间进行信号中继和协议转换。
控制逻辑执行
实现设备中部分控制单元的逻辑功能，如气体切换控制、阀门控制、机械动作触发等。
通信管理
管理与主控PLC、上位机、其他模块之间的数据通信，可能集成串口、以太网或专用总线。
三、典型应用设备
该电路板适用于多种TEL设备中，常见使用环境包括：
Etch（干法刻蚀设备）
控制射频匹配器、等离子体源、真空阀状态反馈等子系统。CVD/ALD（化学气相沉积）设备
管理化学源开关、温度控制回路、腔体保护装置等。Coater/Developer（光刻涂胶显影系统）
控制旋转台、加热单元、显影液泵等动作执行器。Wafer Transfer Systems（晶圆搬运系统）
连接机器人控制器、位置传感器、真空吸盘控制系统。
英文资料：
TEL Tokyo Electron 3D81-000020-14 Printed Circuit Board (PCB) is a specialized electronic control board used in semiconductor manufacturing equipment. This circuit board mainly undertakes tasks such as signal processing, device control, data communication, or interface relay, and plays an important role in various core equipment systems of TEL.
1、 Basic Information
Product Name: Printed Circuit Board/Control Board
Product model: 3D81-000020-14
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Control, Communication, or Interface Processing PCB
Application location: Embedded in the main control system, electrical cabinet or subsystem interface unit of TEL equipment
2、 Core functions (depending on specific configuration)
Signal conditioning and processing
Perform front-end processing such as sampling, amplification, and filtering on input signals (analog/digital).
Interface relay
Perform signal relay and protocol conversion between the main controller, actuators, and sensors.
Control logic execution
Implement the logical functions of some control units in the device, such as gas switching control, valve control, mechanical action triggering, etc.
Communication Management
Manage data communication between the main control PLC, upper computer, and other modules, which may integrate serial ports, Ethernet, or dedicated buses.
3、 Typical application devices
This circuit board is suitable for various TEL devices, and common usage environments include:
Etch (dry etching equipment)
Control subsystems such as RF matching device, plasma source, and vacuum valve status feedback.
CVD/ALD (Chemical Vapor Deposition) equipment
Manage chemical source switches, temperature control circuits, chamber protection devices, etc.
Coater/Developer (photoresist coating development system)
Control the actuators such as the rotary table, heating unit, and developer pump.
Wafer Transfer Systems
Connect the robot controller, position sensor, and vacuum suction cup control system.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 2668 180-291 slot control
| PXIe-8105 | R24HENA-HS-LB-NV-00 | R43GE-A-R2-NS-NV-00 |
| PXIe-7976R | R35JENC-R2-NS-NV-00 | S22GNAA-RNNM-00 |
| PXIe-7965R | R33HSNC-HS-NF-NV-02 | R34JENC-TS-NF-NV-00 |
| PXIe-7962R | R33GSNC-HS-NS-NV-02 | R34JENP-R2-NS-NV-00 |
| pxie-6738 | SC101-001-T3 | S21HNNA-HFVM-00 |
| PXIe-6674T | R32HSNC-TS-NS-NV-02 | R22GENT-TS-NS-NV-02 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
