TEL Tokyo Electron TA3002-800107-01紫外线灯箱
1.产 品 资 料 介 绍：
中文资料：
产品型号：TA3002-800107-01
产品名称：紫外线灯箱（Ultraviolet (UV) Light Box）
制造商：Tokyo Electron Ltd.（TEL）
部件类别：光源模块 / UV照射单元
一、产品概述：
TA3002-800107-01 紫外线灯箱是Tokyo Electron半导体设备中用于光刻、曝光或清洗等工艺环节的关键光源模块。该灯箱通过发射特定波长的紫外线，实现晶圆表面光敏材料的曝光或光化学反应，保证高精度的工艺控制。
该模块设计符合高稳定性和均匀性要求，确保工艺过程中的光强一致性及设备安全。
二、主要功能：
| 功能模块 | 说明 |
|---|---|
| 紫外线发射 | 发出特定波长（通常为UV-C或UV-V波段）的紫外线光束 |
| 光强均匀 | 设计光源分布，保证照射区域光强均匀性 |
| 温度控制 | 内置散热装置或风扇，维持灯箱稳定工作温度 |
| 安全保护 | 配备防紫外线泄漏及电气保护措施 |
| 接口兼容 | 可与设备控制系统连接，实现开关及状态监控 |
三、技术参数（典型指标参考）：
| 项目 | 参数说明 |
|---|---|
| 发射波长 | 254 nm（常见UV-C波段）或其他指定波段 |
| 光强度 | 以mW/cm²计量，确保工艺需求 |
| 灯管类型 | 荧光灯管或LED紫外线灯 |
| 电源需求 | 220V AC或24V DC，视具体设计 |
| 使用寿命 | 约数千至上万小时 |
| 尺寸规格 | 根据设备设计定制，适配安装位置 |
英文资料：
Product model: TA3002-800107-01
Product Name: Ultraviolet (UV) Light Box
Manufacturer: Tokyo Electron Ltd. (TEL)
Component category: Light source module/UV irradiation unit
1、 Product Overview:
TA3002-800107-01 UV light box is a key light source module used in Tokyo Electron semiconductor equipment for photolithography, exposure, or cleaning processes. This lightbox emits ultraviolet light of a specific wavelength to achieve exposure or photochemical reaction of photosensitive materials on the wafer surface, ensuring high-precision process control.
This module is designed to meet high stability and uniformity requirements, ensuring consistent light intensity and equipment safety during the manufacturing process.
2、 Main functions:
Function module description
Ultraviolet emission emits a specific wavelength (usually UV-C or UV-V band) of ultraviolet light beam
Uniform design of light source distribution to ensure uniform light intensity in the illuminated area
Temperature control with built-in cooling device or fan to maintain stable operating temperature of the lightbox
Safety protection equipped with anti UV leakage and electrical protection measures
Interface compatibility allows for connection with device control systems, enabling switch and status monitoring
3、 Technical parameters (typical indicators reference):
Project parameter description
Emission wavelength 254 nm (common UV-C band) or other specified band
The light intensity is measured in mW/cm ² to ensure process requirements
Lamp type: fluorescent tube or LED ultraviolet lamp
The power requirement is 220V AC or 24V DC, depending on the specific design
The service life is approximately thousands to tens of thousands of hours
The size specifications are customized according to the equipment design and adapted to the installation position
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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