TEL Tokyo Electron 1B80-002397-11控制器模块
1.产 品 资 料 介 绍：
中文资料：
产品型号：1B80-002397-11
产品名称：控制器模块（Controller Module）
制造商：Tokyo Electron Ltd.（TEL）
部件类别：系统控制单元 / 嵌入式控制模块
一、产品概述：
1B80-002397-11 控制器模块是 TEL 半导体设备中的核心控制组件，主要用于协调设备内多个子系统的运行，处理实时数据，执行工艺控制指令。它通过与传感器、驱动单元及上位系统进行交互，实现精准、自动化的设备运行控制。
该模块广泛用于如 Clean Track、Etch、Coater/Developer 或 PVD/CVD 系列等高端工艺设备中。
二、主要功能：
| 功能类型 | 功能说明 |
|---|---|
| 工艺流程控制 | 管理半导体工艺步骤（如清洗、烘干、涂胶等） |
| I/O信号处理 | 接收和输出多路数字量/模拟量信号 |
| 状态监控 | 实时监测设备运行状态、温度、压力等参数 |
| 通信接口管理 | 与上位机、HMI、人机界面或其他控制板通信 |
| 故障处理功能 | 异常诊断与保护控制，联动报警与停机功能 |
英文资料：
Product model: 1B80-002397-11
Product Name: Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Category: System Control Unit/Embedded Control Module
1、 Product Overview:
The 1B80-002397-11 controller module is the core control component in TEL semiconductor equipment, mainly used to coordinate the operation of multiple subsystems within the equipment, process real-time data, and execute process control instructions. It interacts with sensors, drive units, and upper level systems to achieve precise and automated equipment operation control.
This module is widely used in high-end process equipment such as Clean Track, Etch, Coach/Developer, or PVD/CVD series.
2、 Main functions:
Function Type Function Description
Process flow control management of semiconductor process steps (such as cleaning, drying, coating, etc.)
I/O signal processing receives and outputs multiple digital/analog signals
Real time monitoring of equipment operation status, temperature, pressure and other parameters through status monitoring
Communication interface management and upper computer HMI、 Human machine interface or other control board communication
Fault handling function, abnormal diagnosis and protection control, linkage alarm and shutdown function
2.产 品 展 示
3.其他产品
4.其他英文产品
Asea 2668-184-280 12 slot control board
HAAS 93-32-3550J Intelligent Driver
ABB CHBX01R 2VAA008575R1 redundant modul
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| PMB33C-10216-00 | 70 EB 02b-E | P21NRXA-LNN-NS-00 |
| PMB33C-10214-03 | AMAT 0100-00112 | PFTL301E 0.1KN 3BSE019050R100 |
| PMB33C-10214-02 | AMAT 0100-00025 | P21NRFA-LNN-NS-00 |
| PMB33C-10214-01 | 07EB62R1 | 57160001-ACA DSDI 120 |
| PMB33C-10214-00 | AMAT 0100-90313 | 57160001-HK DSTD 185 |
| PMB33C-10201-03 | AMAT 0100-00496 | KT 5191a |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
