TEL Tokyo Electron 3381-000074-12照明控制板

TEL Tokyo Electron  3381-000074-12照明控制板

1.产 品 资 料 介 绍：

中文资料：

产品型号： TEL Tokyo Electron 3381-000074-12
产品类型： 照明控制板（Lighting Control Board）
功能定位： 用于半导体制造设备中照明系统的控制与调节模块

一、产品功能概述：

3381-000074-12 照明控制板是 Tokyo Electron（TEL）设计的专用电子控制板，主要用于管理设备内部及工艺相关区域的照明设备。通过该控制板，设备能够实现对光源的开关控制、亮度调节及状态监测，保障工艺环境的可视化需求和维护作业的安全性。

二、主要应用领域：

1. 半导体制造设备内部照明控制

   • 控制刻蚀机、CVD、PVD等工艺设备内部工作区域和视窗的照明系统，确保工艺观察和维护操作的良好光线环境。

2. 洁净室设备照明管理

   • 在洁净室环境中管理设备周边辅助照明，满足洁净级别下的安全和操作规范。

3. 工艺视觉检测辅助照明

   • 为光学检测系统、摄像头或视觉传感器提供可调节照明支持，提高检测准确度。

4. 设备状态指示灯控制

   • 控制设备面板上的状态指示灯，反馈运行状态、报警信息等。

5. 远程照明调节与监控

   • 支持通过主控系统或人机界面实现远程开关控制及亮度调节，提高操作便捷性。

三、典型适用设备：

• TEL Trias 系列薄膜沉积设备

• TEL Unity 系列刻蚀设备

• TEL Alpha 系列扩散炉

• TEL Clean Track 晶圆处理及清洗设备

• TEL ACT 光刻胶显影及涂布设备

英文资料：

Product model: TEL Tokyo Electron 3381-000074-12

Product type: Lighting Control Board

Functional positioning: Used as a control and adjustment module for lighting systems in semiconductor manufacturing equipment

1、 Product Function Overview:

3381-000074-12 Lighting Control Board is a specialized electronic control board designed by Tokyo Electron (TEL), mainly used to manage lighting equipment inside equipment and process related areas. Through this control board, the equipment can achieve on/off control, brightness adjustment, and status monitoring of the light source, ensuring the visualization requirements of the process environment and the safety of maintenance operations.

2、 Main application areas:

Internal lighting control of semiconductor manufacturing equipment

Control the lighting system of the internal working area and windows of etching machines, CVD, PVD and other process equipment to ensure a good lighting environment for process observation and maintenance operations.

Cleanroom equipment lighting management

Manage auxiliary lighting around equipment in a clean room environment to meet safety and operational standards at the cleanliness level.

Process visual inspection auxiliary lighting

Provide adjustable lighting support for optical detection systems, cameras, or visual sensors to improve detection accuracy.

Equipment status indicator light control

Control the status indicator lights on the device panel to provide feedback on operating status, alarm information, etc.

Remote lighting adjustment and monitoring

Support remote switch control and brightness adjustment through the main control system or human-machine interface, improving operational convenience.

3、 Typical applicable equipment:

TEL Trias series thin film deposition equipment

TEL Unity series etching equipment

TEL Alpha series diffusion furnace

TEL Clean Track wafer processing and cleaning equipment

TEL ACT photoresist development and coating equipment

2.产      品      展      示      

3.其他产品

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ABB 3DDE300410 Display

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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