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TEL Tokyo Electron 710-806050-01单板计算机

发布时间:2025-07-02人气:
  • TEL Tokyo Electron 710-806050-01单板计算机
  • TEL Tokyo Electron 710-806050-01单板计算机
  • TEL Tokyo Electron 710-806050-01单板计算机

TEL Tokyo Electron  710-806050-01单板计算机

1.产 品 资 料 介 绍:

中文资料:

一、基本信息

  • 产品型号:710-806050-01

  • 产品名称:单板计算机(SBC,Single Board Computer)

  • 制造商:Tokyo Electron Ltd.(东京电子)

  • 功能定位:作为设备主控单元或嵌入式控制平台,运行控制软件、执行工艺流程、协调子系统通信。


二、主要功能

  1. 主控制系统处理核心

    • 该单板计算机作为主控模块运行 TEL 专有控制系统或嵌入式操作系统(如 VxWorks、QNX、Linux RT 或 Windows Embedded),控制整机工艺流程。

  2. 数据处理与实时响应

    • 处理来自传感器、接口模块、操作面板的数据并实时做出控制逻辑响应。

  3. 通信与网络管理

    • 提供以太网、串口、USB、现场总线等通信接口,支持与上位机(如 FAB 管理系统)、本地设备(如泵、阀、传感器)连接。

  4. 设备状态监控与日志记录

    • 实时记录设备运行状态、报警信息、维护日志等,用于工艺追溯或故障诊断。


三、应用领域

  • 半导体制造设备主控平台

    • 应用于 Tokyo Electron 的蚀刻设备(Etch)、化学气相沉积设备(CVD)、光刻工艺辅助系统、晶圆处理和输送系统等。

  • 嵌入式子系统控制单元

    • 作为独立工艺单元(如气路控制单元、温控子系统、电源控制系统)中的核心控制平台。

  • 工业通信管理中心

    • 集中管理 I/O 模块、PLC、显示模块、远程操作终端之间的数据交换。

英文资料:

1、 Basic Information

Product model: 710-806050-01


Product Name: Single Board Computer (SBC)


Manufacturer: Tokyo Electron Ltd


Functional positioning: As the main control unit or embedded control platform of the device, it runs control software, executes process flow, and coordinates subsystem communication.


2、 Main functions

Main control system processing core


This single board computer serves as the main control module to run TEL proprietary control systems or embedded operating systems (such as VxWorks, QNX, Linux RT, or Windows Embedded), controlling the overall process flow of the machine.


Data processing and real-time response


Process data from sensors, interface modules, and operation panels and make real-time control logic responses.


Communication and Network Management


Provide Ethernet, serial port USB、 Communication interfaces such as fieldbus support connection with upper computer (such as FAB management system) and local devices (such as pumps, valves, sensors).


Equipment status monitoring and logging


Real time recording of equipment operating status, alarm information, maintenance logs, etc., for process traceability or fault diagnosis.


3、 Application Fields

Semiconductor manufacturing equipment main control platform


Applied to etching equipment (Etch), chemical vapor deposition equipment (CVD), photolithography process assistance systems, wafer processing and transport systems, etc. of Tokyo Electron.


Embedded subsystem control unit


As the core control platform in independent process units such as gas path control units, temperature control subsystems, and power control systems.


Industrial Communication Management Center


Centralized management of I/O modules PLC、 Data exchange between display modules and remote operation terminals.

2.产      品      展      示      

kla_instruments_710-806050-01_video_interface_pcb_tel_tokyo_electron_p-8_used_1.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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