TEL Tokyo Electron CX81-050059-V1控制板
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：CX81-050059-V1
产品名称：控制板（Control Board）
制造商：Tokyo Electron Ltd.（东京电子）
模块类别：工艺控制子系统主控板或接口板
应用设备：广泛用于 TEL 半导体制造设备中，如蚀刻（Etch）、化学气相沉积（CVD）、晶圆处理和搬运系统等。
二、功能定位
工艺控制核心
执行特定工艺流程的控制指令，管理相关执行单元的操作。
信号集成与处理
汇聚多个传感器输入信号，进行预处理和信号转换。
执行命令输出
通过数字和模拟输出接口控制阀门、泵浦、电机等执行部件。
通信接口管理
连接上位主控系统，实现数据交换与命令接收。
三、应用领域
半导体制造设备子系统控制
控制气体流量、真空系统、加热和冷却单元、机械搬运等子模块。
自动化工艺流程管理
支持设备自动化运行及状态监控。
四、技术特点（典型）
多通道模拟及数字输入/输出接口
兼容 TEL 专用通信协议及工业总线接口
工业级电子元件，适应洁净室环境
插拔式设计，方便维护和模块更换
具备状态指示灯，支持故障诊断功能
英文资料：
1、 Basic Information
Product Model: CX81-050059-V1
Product Name: Control Board
Manufacturer: Tokyo Electron Ltd
Module category: Process control subsystem main control board or interface board
Application equipment: Widely used in TEL semiconductor manufacturing equipment, such as etching (Etch), chemical vapor deposition (CVD), wafer processing and handling systems, etc.
2、 Functional positioning
Process Control Core
Execute control instructions for specific process flows and manage the operations of related execution units.
Signal Integration and Processing
Aggregate multiple sensor input signals for preprocessing and signal conversion.
Execute command output
Control executing components such as valves, pumps, motors, etc. through digital and analog output interfaces.
Communication interface management
Connect to the upper control system to achieve data exchange and command reception.
3、 Application Fields
Semiconductor manufacturing equipment subsystem control
Control sub modules such as gas flow rate, vacuum system, heating and cooling unit, mechanical handling, etc.
Automated process management
Support automated operation and status monitoring of equipment.
4、 Technical characteristics (typical)
Multi channel analog and digital input/output interfaces
Compatible with TEL dedicated communication protocol and industrial bus interface
Industrial grade electronic components, suitable for cleanroom environments
Plug in design, convenient for maintenance and module replacement
Equipped with status indicator lights and supporting fault diagnosis function
2.产 品 展 示
3.其他产品
4.其他英文产品
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REXROTH PPC-R22.1N-T-NN-P1-NN-FW servo
DELTA TAU ACC-24E2 interface simulation
| 710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
| 710-658232-00 | 8005-EPS-51 | 8030-CRM-931 |
| 710-658172-20 | 8005-EPS-50 | 8030-CRM-720 |
| 710-658161-20 | 8005-EBU-1 | 8030-CRM-601 |
| 710-658086-20 | 8005-DN-216 | F31X133PRUAJG1 |
| 710-658081-20 | 8005-DN-208 | 710-611538-000 |
| 710-658046-20 | 8005-DN-116 | 820-21036-001 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
