TEL Tokyo Electron 2L81-050211-17传感器模块
1.产 品 资 料 介 绍：
中文资料：
产品名称：2L81-050211-17 传感器模块
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：传感器模块（Sensor Module）
一、产品概述
2L81-050211-17 是 Tokyo Electron（TEL）半导体制造设备中使用的一种传感器模块，属于关键的现场检测与反馈组件，通常用于采集温度、压力、位置、气流或真空度等运行参数，实现对工艺过程的精确监测与反馈控制。
二、主要功能
环境或设备状态感知
监测腔体内温度、真空压力、气体流量、液位、动作位置等物理量。
信号转换输出
将采集到的模拟量或数字量信号传输至上位控制系统或I/O板卡。
与控制系统联动
支持实时反馈，用于工艺控制、异常报警、安全互锁等功能。
三、适用场景
此类传感器模块广泛应用于以下 TEL 系统的控制单元中：
Etcher 干法蚀刻设备
PVD/CVD 真空薄膜沉积系统
Coater/Developer 涂胶显影设备
清洗设备、气体输送与真空系统
英文资料：
Product Name: 2L81-050211-17 Sensor Module
Manufacturer: Tokyo Electron Ltd
Product type: Sensor Module
1、 Product Overview
2L81-050211-17 is a sensor module used in Tokyo Electron (TEL) semiconductor manufacturing equipment, which is a key on-site detection and feedback component. It is usually used to collect operating parameters such as temperature, pressure, position, airflow, or vacuum degree, achieving precise monitoring and feedback control of the process.
2、 Main functions
Environmental or device status perception
Monitor physical quantities such as temperature, vacuum pressure, gas flow rate, liquid level, and action position inside the chamber.
Signal conversion output
Transmit the collected analog or digital signals to the upper control system or I/O board.
Linkage with control system
Support real-time feedback for process control, abnormal alarm, safety interlock and other functions.
3、 Applicable scenarios
This type of sensor module is widely used in the control units of the following TEL systems:
Etcher dry etching equipment
PVD/CVD Vacuum Thin Film Deposition System
Coater/Developer coating and developing equipment
Cleaning equipment, gas delivery, and vacuum systems
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
