TEL Tokyo Electron 1181-000393-18电机单元分布板

TEL Tokyo Electron  1181-000393-18电机单元分布板

1.产 品 资 料 介 绍：

中文资料：

产品名称：1181-000393-18 电机单元分布板
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：电机单元分布板（Motor Unit Distribution Board）

一、产品概述

1181-000393-18 是一款专用于 Tokyo Electron 半导体设备中的 电机控制系统 的分布式电路板。该板卡主要用于连接多个电机单元，完成电源与信号的分配、隔离、驱动控制等功能，起到 集中供电与信号接口管理 的作用。

二、核心功能

1. 电机驱动信号分配

   • 将主控系统发出的控制信号分发至多个伺服电机或步进电机，实现精准动作控制。

2. 电源分配与保护

   • 负责向电机及其控制回路提供稳定的电源，同时具备过流、过压保护设计，保障系统安全。

3. 信号集中管理

   • 汇总来自各电机的反馈信号（如编码器、限位开关、位置反馈等），并发送至主控板处理。

4. 物理接口中转

   • 提供标准化接插件（如Molex、多针排线）实现快速安装、维护和替换。

三、典型应用设备

该电机单元分布板广泛应用于 Tokyo Electron 以下设备的传动系统中：

• 晶圆搬运系统（如 Load Port、Aligner、Robot Arm）

• 涂胶显影设备（Coater/Developer）中的旋转台驱动

• CVD、Etcher、Ashing 系统的机械定位单元

• 晶圆升降平台、电动门控、输送模组等

英文资料：

Product Name: 1181-000393-18 Motor Unit Distribution Board

Manufacturer: Tokyo Electron Ltd

Product type: Motor Unit Distribution Board

1、 Product Overview

1181-000393-18 is a distributed circuit board specifically designed for motor control systems in Tokyo Electron semiconductor equipment. This board is mainly used to connect multiple motor units, complete functions such as power and signal distribution, isolation, and drive control, and play a role in centralized power supply and signal interface management.

2、 Core functions

Motor drive signal distribution

Distribute the control signals from the main control system to multiple servo motors or stepper motors to achieve precise motion control.

Power distribution and protection

Responsible for providing stable power supply to the motor and its control circuit, while also having overcurrent and overvoltage protection design to ensure system safety.

Centralized signal management

Summarize feedback signals from various motors (such as encoders, limit switches, position feedback, etc.) and send them to the main control board for processing.

Physical interface transfer

Provide standardized connectors (such as Molex, multi pin ribbon cables) for quick installation, maintenance, and replacement.

3、 Typical application devices

This motor unit distribution board is widely used in the transmission system of the following equipment in Tokyo Electron:

Wafer handling systems (such as Load Port, Aligner, Robot Arm)

Rotary table drive in Coater/Developer equipment

Mechanical positioning units for CVD, Etcher, Ashing systems

Wafer lifting platform, electric gate control, conveyor module, etc

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218