TEL Tokyo Electron 308-600044-2背板接口板

TEL Tokyo Electron  308-600044-2背板接口板

1.产 品 资 料 介 绍：

中文资料：

产品名称：308-600044-2 背板接口板
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：背板接口板（Backplane Interface Board）

一、产品概述

308-600044-2 是 TEL 半导体设备中用于系统级信号与电源传输的 背板接口板，属于核心连接平台，用于连接多个子板（控制板、I/O 板、电源板等），实现信号集中管理、电源分配与板间通信。通常安装在主控框架或模块化机架内部。

二、核心功能

1. 模块互联平台

   • 为多个功能板卡提供统一插槽，支持热插拔或模块化更换。

   • 保证控制逻辑、信号和电源的统一传输路径。

2. 电源分配与接地管理

   • 将集中供电系统输出的直流电源（如 24V/12V/5V DC）分配至各功能板卡。

   • 管理系统接地，确保信号完整性与系统稳定。

3. 信号中转与通信桥接

   • 搭载数据总线、控制线、电源线，实现板卡间高速通信。

   • 连接如 RS232、CAN、TTL 等工业通信协议信号线。

三、典型应用设备

该背板接口板适用于以下 Tokyo Electron 系列设备的控制机架或主模块中：

• 涂胶显影设备（Coater/Developer）

• Etcher 蚀刻设备

• CVD/PVD 真空薄膜沉积设备

• 晶圆搬运系统（Robot/Load Port/Aligner）

• 气体输送系统、真空腔室子系统

英文资料：

Product Name: 308-600044-2 Backplane Interface Board

Manufacturer: Tokyo Electron Ltd

Product type: Backplane Interface Board

1、 Product Overview

308-600044-2 is a backplane interface board used for system level signal and power transmission in TEL semiconductor equipment. It belongs to the core connection platform and is used to connect multiple sub boards (control board, I/O board, power board, etc.) to achieve centralized signal management, power distribution, and inter board communication. Usually installed inside the main control frame or modular rack.

2、 Core functions

Module interconnection platform

Provide a unified slot for multiple functional boards, supporting hot swapping or modular replacement.

Ensure a unified transmission path for control logic, signals, and power supply.

Power distribution and grounding management

Distribute the DC power output from the centralized power supply system (such as 24V/12V/5V DC) to each functional board.

Grounding the management system to ensure signal integrity and system stability.

Signal relay and communication bridging

Equipped with data bus, control line, and power line to achieve high-speed communication between boards.

Connect industrial communication protocol signal lines such as RS232, CAN, TTL, etc.

3、 Typical application devices

This backplane interface board is suitable for control racks or main modules of the following Tokyo Electron series devices:

Coater/Developer

Etcher etching equipment

CVD/PVD vacuum thin film deposition equipment

Wafer handling system (Robot/Load Port/Signer)

Gas delivery system, vacuum chamber subsystem

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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