TEL Tokyo Electron 3D80-000259-15控制器机架
1.产 品 资 料 介 绍：
中文资料：
产品名称：3D80-000259-15 控制器机架
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制器机架（Controller Rack / Module Chassis）
一、产品概述
3D80-000259-15 控制器机架 是 Tokyo Electron 半导体设备中用于安装和集中管理多个控制模块、电路板卡、电源单元等部件的标准化机架结构件。该机架提供统一的物理支持、电气接口及信号分配基础，保障控制系统结构有序、运行可靠。
二、核心功能
模块化安装平台
提供标准插槽或固定位置，用于安装控制板、I/O 模块、电源卡、通信接口等功能单元。
集中供电与信号分配
内部集成背板（Backplane）或接线排，用于统一供电、数据通信及信号中继。
结构支撑与防护
采用高强度金属材料制造，适配洁净室及工业环境，具备一定的抗震与抗电磁干扰能力。
热管理支持
支持风冷、导热或自然对流散热方式，有利于机内电子模块稳定运行。
三、典型应用系统
该控制器机架适用于 Tokyo Electron 各类半导体设备中的主控与子系统控制平台，如：
蚀刻系统（Etcher）主控区
CVD / PVD 薄膜沉积设备子控制单元
搬运控制系统（EFEM、机器人、Loadport）
真空腔体控制子系统、电源驱动控制区
英文资料：
Product Name: 3D80-000259-15 Controller Rack
Manufacturer: Tokyo Electron Ltd
Product Type: Controller Rack/Module Chassis
1、 Product Overview
The 3D80-000259-15 controller rack is a standardized rack structure component used in Tokyo Electron semiconductor equipment for installing and centrally managing multiple control modules, circuit boards, power units, and other components. This rack provides a unified physical support, electrical interface, and signal distribution foundation to ensure the orderly structure and reliable operation of the control system.
2、 Core functions
Modular installation platform
Provide standard slots or fixed positions for installing functional units such as control boards, I/O modules, power cards, communication interfaces, etc.
Centralized power supply and signal distribution
Internally integrated backplane or wiring board, used for unified power supply, data communication, and signal relay.
Structural support and protection
Made of high-strength metal materials, suitable for clean rooms and industrial environments, with certain seismic and electromagnetic interference resistance capabilities.
Thermal management support
Supporting air cooling, heat conduction, or natural convection heat dissipation methods is beneficial for the stable operation of electronic modules inside the machine.
3、 Typical application system
This controller rack is suitable for the main control and subsystem control platforms in various semiconductor devices of Tokyo Electron, such as:
Etcher main control area
CVD/PVD thin film deposition equipment sub control unit
Handling control systems (EFEM, robots Loadport）
Vacuum chamber control subsystem, power drive control area
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
