TEL Tokyo Electron 3281-000134-11连接器模块

TEL Tokyo Electron  3281-000134-11连接器模块

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 3281-000134-11 连接器模块 是东京电子（TEL）用于半导体制造设备中的一种标准化电气连接部件，主要用于设备内部各功能单元之间的信号、电源或数据连接。该模块属于设备内部“模块化通信与控制系统”中的重要组成部分，广泛应用于晶圆处理平台、前道工艺设备及自动化控制单元中。

一、基本信息

二、主要功能

1. 信号中继与连接

   • 用于在主控单元与执行单元（如传感器、致动器、I/O模块等）之间建立物理连接；

   • 通过排线、电缆或PCB接插件将电信号稳定、高效地传输至目标部件。

2. 模块间电气接口管理

   • 支持多通道输入/输出接口，将多个信号接口集中管理，简化接线；

   • 具备清晰的信号分配结构，方便设备调试与故障定位。

3. 结构化布线

   • 实现控制柜或机架内部的模块化布线，提升设备维护效率；

   • 降低因接线杂乱导致的误接、松动、干扰等风险。

三、应用领域

1. 半导体工艺设备

   • 应用于TEL的涂胶显影机、蚀刻设备、清洗系统、真空腔体等；

   • 实现设备各子系统之间的信号、电源、控制总线连接。

2. 自动化生产系统

   • 用于晶圆传输平台、搬运机械手、升降装置等自动化机构的信号连接；

   • 支持设备控制器、I/O板、分析模块之间的互连。

3. 系统升级与维护

   • 在设备升级或改造过程中，用作旧部件与新系统的电气过渡接口；

   • 故障诊断中也常作为接线中断与信号测试的便捷接口点。

英文资料：

The TEL Tokyo Electron 3281-000134-11 connector module is a standardized electrical connection component used by Tokyo Electronics (TEL) in semiconductor manufacturing equipment. It is mainly used for signal, power, or data connections between various functional units inside the equipment. This module is an important component of the internal "modular communication and control system" of the equipment, widely used in wafer processing platforms, front-end process equipment, and automation control units.

1、 Basic Information

Project Content

Product model 3281-000134-11

Product Name: Connector Module

Manufacturer Tokyo Electron Ltd

Type Electrical Connection/Signal Relay Module

2、 Main functions

Signal Relay and Connection

Used to establish physical connections between the main control unit and execution units (such as sensors, actuators, I/O modules, etc.);

Stable and efficient transmission of electrical signals to target components through cables, wires, or PCB connectors.

Management of electrical interfaces between modules

Support multi-channel input/output interfaces, centrally manage multiple signal interfaces, and simplify wiring;

Having a clear signal distribution structure, it facilitates equipment debugging and fault location.

Structured Cabling

Implement modular wiring inside control cabinets or racks to improve equipment maintenance efficiency;

Reduce the risks of misconnection, looseness, interference, and other issues caused by messy wiring.

3、 Application Fields

Semiconductor process equipment

Applied to TEL's coating and developing machines, etching equipment, cleaning systems, vacuum chambers, etc;

Implement signal, power, and control bus connections between various subsystems of the device.

Automated production system

Used for signal connection of automated mechanisms such as wafer transfer platforms, handling robots, lifting devices, etc;

Support interconnection between device controllers, I/O boards, and analysis modules.

System upgrade and maintenance

Used as an electrical transition interface between old components and new systems during equipment upgrades or renovations;

In fault diagnosis, it is often used as a convenient interface point for wiring interruption and signal testing.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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