TEL Tokyo Electron 2L81-050095-11控制脉冲卡件
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L81-050095-11 控制脉冲卡件 是一款用于东京电子（TEL）半导体制造设备中的高精度控制模块，负责产生和管理关键设备部件所需的脉冲信号，常用于驱动、定时或同步相关执行元件，是设备中实现高效自动化控制的核心组件之一。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 控制脉冲卡件（Control Pulse Board） |
| 产品型号 | 2L81-050095-11 |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 安装方式 | 插拔式模块，安装于控制系统机架或主板卡槽中 |
二、核心功能
脉冲信号输出
用于生成可编程脉冲信号，驱动如步进电机、伺服驱动器、执行器等部件；
控制设备的启停、位置移动、切换节拍等核心动作。
精密定时与同步控制
实现工艺流程中多个子系统或部件间的动作时序控制；
支持与主控制板协同完成复杂的联动逻辑控制。
信号隔离与保护
内置电气隔离结构，防止外部高频干扰或电压异常传入主控系统；
具备基本的过载、过压保护功能。
三、典型应用场景
涂胶显影设备（Coater/Developer）
控制旋转平台、涂胶臂或显影机构的精确动作节拍；
管理气动或电动阀的开关脉冲。
晶圆搬运系统
控制机械臂或升降平台的步进动作，实现精准传输与定位；
协调不同工艺站之间的同步运行。
工艺过程协调控制
用于等离子蚀刻、真空处理或热处理等系统中的脉冲输出信号；
提供同步触发信号，实现工艺节奏精确控制。
英文资料：
TEL Tokyo Electron 2L81-050095-11 Control Pulse Card is a high-precision control module used in Tokyo Electronics (TEL) semiconductor manufacturing equipment, responsible for generating and managing pulse signals required for key equipment components. It is commonly used to drive, timing, or synchronize related actuators and is one of the core components for achieving efficient automation control in equipment.
1、 Basic Product Information
Project Content
Product Name: Control Pulse Board
Product model 2L81-050095-11
Manufacturer Tokyo Electron Ltd
Installation method: Plug in module, installed in the control system rack or motherboard slot
2、 Core functions
Pulse signal output
Used to generate programmable pulse signals to drive components such as stepper motors, servo drivers, actuators, etc;
Control the core actions of equipment such as start stop, position movement, and switching rhythm.
Precise timing and synchronous control
Implement timing control of actions between multiple subsystems or components in the process flow;
Support collaboration with the main control board to complete complex linkage logic control.
Signal isolation and protection
Built in electrical isolation structure to prevent external high-frequency interference or abnormal voltage from entering the main control system;
It has basic overload and overvoltage protection functions.
3、 Typical application scenarios
Coater/Developer
Control the precise movement rhythm of the rotating platform, coating arm, or developing mechanism;
Manage the switching pulses of pneumatic or electric valves.
Wafer handling system
Control the stepping action of the robotic arm or lifting platform to achieve precise transmission and positioning;
Coordinate the synchronous operation between different process stations.
Process coordination and control
Pulse output signals used in systems such as plasma etching, vacuum treatment, or heat treatment;
Provide synchronous trigger signals to achieve precise control of process rhythm.
2.产 品 展 示
3.其他产品
4.其他英文产品
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
Teknic SST-1500-XCX Digital Servo Drive
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| SR489-CASE | SC403-002-T4 | SC904NN-001-01 |
| SR469-P5-LO-A20-T | SC402-011-T3 | SC933-050-01 |
| SR469-P5-LO-A20-E | SC452-044-05 | SC903-020-01 |
| SR469-P5-LO-A20 | AMAT 0100-09050 | SC903TN-001-01 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
