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TEL Tokyo Electron 3281-000034-15 半导体模块

发布时间:2025-07-07人气:
  • TEL Tokyo Electron  3281-000034-15 半导体模块
  • TEL Tokyo Electron  3281-000034-15 半导体模块
  • TEL Tokyo Electron  3281-000034-15 半导体模块

TEL Tokyo Electron  3281-000034-15 半导体模块

1.产 品 资 料 介 绍:

中文资料:

TEL Tokyo Electron 3281-000034-15 半导体模块 是一款用于半导体制造设备中的专用功能模块,属于 TEL Tokyo Electron 的定制硬件,广泛部署于其刻蚀、CVD、清洗和输送等工艺设备中。该模块按 TEL 命名规则,归类于 3281 系列,通常表示电气控制、信号处理或通信接口类的功能模块

以下是该模块的详细功能与应用领域分析(无图案):


一、基本信息

  • 产品型号: 3281-000034-15

  • 产品名称: 半导体设备专用模块

  • 制造商: Tokyo Electron Ltd.(TEL)

  • 模块类型: 控制/通信/逻辑处理单元(依据TEL设备模块体系)


二、核心功能(依据编号结构与TEL模块特性推测)

  1. 信号中继与接口管理

    • 实现设备内部多个子系统之间的电信号桥接;

    • 提供信号缓冲、转换、电平适配等功能,确保系统通信可靠稳定。

  2. 通信与总线接口处理

    • 支持 TEL 内部控制总线、I/O 接口总线或外部通信协议(如 RS-232、TTL、CAN等);

    • 用于主控板(如 E244 系列)与从属设备之间的命令和状态传输。

  3. 状态监控与逻辑执行

    • 集成控制逻辑器件(如 FPGA、逻辑门阵列),用于处理输入信号并驱动控制逻辑;

    • 可能带有状态灯、错误检测、设备联锁等功能。

  4. 模块化连接

    • 可插入 TEL 系统控制机架或背板;

    • 与 E249、BX81、1B80 等系列模块配套,组成完整工艺控制链路。

英文资料:

TEL Tokyo Electron 3281-000034-15 semiconductor module is a specialized functional module used in semiconductor manufacturing equipment, belonging to TEL Tokyo Electron's customized hardware, widely deployed in its etching CVD、 In process equipment such as cleaning and conveying. This module is classified under the 3281 series according to the TEL naming convention, typically representing functional modules in the fields of electrical control, signal processing, or communication interfaces.


The following is a detailed analysis of the module's functions and application areas (without patterns):


1、 Basic Information

Product model: 3281-000034-15


Product Name: Semiconductor Equipment Dedicated Module


Manufacturer: Tokyo Electron Ltd. (TEL)


Module type: Control/Communication/Logic Processing Unit (based on TEL device module system)


2、 Core functions (inferred based on numbering structure and TEL module characteristics)

Signal Relay and Interface Management


Realize electrical signal bridging between multiple subsystems within the device;


Provide functions such as signal buffering, conversion, and level adaptation to ensure reliable and stable system communication.


Communication and bus interface processing


Support TEL internal control bus, I/O interface bus, or external communication protocols (such as RS-232, TTL, CAN, etc.);


Used for command and status transmission between the main control board (such as E244 series) and slave devices.


Status monitoring and logic execution


Integrated control logic devices (such as FPGA, logic gate array) are used to process input signals and drive control logic;


It may have functions such as status lights, error detection, and equipment interlocking.


Modular connection


Can be inserted into TEL system control rack or backplane;


Paired with E249, BX81, 1B80 and other series modules, it forms a complete process control chain.

2.产      品      展      示      

tokyo_electron_tel_tvb3002-1_bxy_3281-000034-15_3208-000034-14.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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