TEL Tokyo Electron 1187-032104-13控制单元模块
1.产 品 资 料 介 绍：
TEL Tokyo Electron 1187-032104-13 控制单元模块
型号： 1187-032104-13
名称： 继电器单元（Relay Unit）
制造商： Tokyo Electron Ltd.（TEL）
应用设备： 主要用于 TEL 的半导体制造设备，尤其是 Alpha 8S / a8s 系列
功能与作用
电路切换控制：通过继电器实现电路通断，控制设备模块之间的电气连接。
信号传递：负责内部控制信号的传递和协调，保证设备模块协同工作。
保护功能：在异常情况下切断电路，防止设备损坏。
典型应用领域
化学气相沉积（CVD）设备的气体流量和反应条件控制。
蚀刻（Etcher）设备的工艺控制。
原子层沉积（ALD）设备的精准气体控制。
其他半导体制造设备中的电路控制和切换。
产品特点
工业级高可靠性设计，适合半导体制造环境。
模块化结构，便于安装、维护和快速更换。
与TEL多款设备和模块兼容，保证系统整体性能。
优良的抗电磁干扰能力，保障信号稳定传输。
英文资料：
TEL Tokyo Electron 1187-032104-13 Control Unit Module
Model: 1187-032104-13
Name: Relay Unit
Manufacturer: Tokyo Electron Ltd. (TEL)
Application equipment: mainly used for TEL semiconductor manufacturing equipment, especially Alpha 8S/a8s series
Function and Function
Circuit switching control: Control the electrical connection between equipment modules by implementing circuit on/off through relays.
Signal transmission: Responsible for the transmission and coordination of internal control signals to ensure the collaborative work of equipment modules.
Protection function: Cut off the circuit in case of abnormal conditions to prevent equipment damage.
Typical application areas
Control of gas flow rate and reaction conditions in chemical vapor deposition (CVD) equipment.
Process control of Etcher equipment.
Accurate gas control of atomic layer deposition (ALD) equipment.
Circuit control and switching in other semiconductor manufacturing equipment.
Product Features
Industrial grade high reliability design, suitable for semiconductor manufacturing environment.
Modular structure, easy to install, maintain, and quickly ｒｅｐｌａｃｅ.
Compatible with multiple TEL devices and modules to ensure overall system performance.
Excellent resistance to electromagnetic interference ensures stable signal transmission.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
