TEL Tokyo Electron 1380-002161-12控制器模块

TEL Tokyo Electron   1380-002161-12控制器模块

1.产 品 资 料 介 绍：

TEL Tokyo Electron 1380-002161-12 控制器模块简介

一、基本信息

• 型号：1380-002161-12

• 别名：INR-244-112D / CIRCULATOR

• 制造商：Tokyo Electron Ltd.（TEL）

• 用途：主要用于半导体制造设备中的流体循环控制系统

二、功能特点

1. 流体循环控制
   该控制器模块负责调节设备中流体（如冷却液或气体）的循环，保证工艺系统的稳定运行。

2. 信号处理与控制
   实现对相关传感器数据的接收和处理，控制流体泵、阀门等执行机构的动作。

3. 设备兼容性
   适配多种TEL半导体设备，如Etcher、CVD、ALD等系统。

三、应用领域

• 半导体制造设备的流体循环管理

• 设备维护与替换备件

• 生产工艺稳定性提升

四、使用注意事项

• 安装兼容性：更换时请确认该模块与设备型号匹配，避免因接口或信号不兼容产生故障。

• 安装规范：按照设备厂商说明进行安装，确保接线正确，固定牢靠。

• 运行监控：初次投入运行时应进行功能测试，确保流体循环控制正常。

• 定期维护：建议定期检查模块状态，清洁连接点，保障系统长期稳定运行。

英文资料：

Introduction to TEL Tokyo Electron 1380-002161-12 Controller Module

1、 Basic Information

Model: 1380-002161-12

Alias: INR-244-112D/CIRCULATOR

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Mainly used for fluid circulation control systems in semiconductor manufacturing equipment

2、 Functional Features

Fluid circulation control

This controller module is responsible for regulating the circulation of fluids (such as coolant or gas) in the equipment to ensure the stable operation of the process system.

Signal Processing and Control

Realize the reception and processing of relevant sensor data, and control the actions of fluid pumps, valves, and other actuators.

device compatibility

Compatible with various TEL semiconductor devices, such as Etcher, CVD, ALD, and other systems.

3、 Application Fields

Fluid circulation management of semiconductor manufacturing equipment

Equipment maintenance and replacement of spare parts

Improvement of production process stability

4、 Precautions for use

Installation compatibility: When replacing, please confirm that the module matches the device model to avoid malfunctions caused by incompatible interfaces or signals.

Installation specifications: Install according to the equipment manufacturer's instructions, ensuring correct wiring and secure fixation.

Operation monitoring: Functional testing should be conducted upon initial operation to ensure proper fluid circulation control.

Regular maintenance: It is recommended to regularly check the module status, clean the connection points, and ensure the long-term stable operation of the system.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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