TEL Tokyo Electron 3208-000029-12电源模块
1.产 品 资 料 介 绍:
产品名称:
TEL Tokyo Electron 3208-000029-12 电源模块
(Power Supply Module)
产品类型与功能:
该模块是 Tokyo Electron 半导体设备中的专用电源模块,主要职责是为设备的控制电路、执行机构、传感系统等提供稳定的直流/交流电源输出,具备以下功能特点:
电压转换(如 AC-DC,DC-DC)
电源滤波与稳压,确保输出电压稳定性
提供短路、过流、过压等保护机制
某些版本可能支持多路输出供电
主要应用领域:
1. 半导体制造设备供电系统
为蚀刻(Etcher)、沉积(CVD/PVD)、光刻(Lithography)等工艺模块供电
提供主控板、I/O模块、传感器、执行器等的低压直流供电(如+5V、+12V、+24V)
2. 控制系统电源核心
作为 TEL 设备内部 PLC、主控制器、电机驱动器等关键模块的核心电源来源
支持长时间稳定运行,适配高精度制造要求
3. 通信与接口电源保障
供电给 RS-232/RS-485 接口、光电隔离模块、网络通信模块
保证系统数据传输不受电源波动干扰
4. 真空系统与执行机构支持
为真空泵控制电路、MFC(质量流量控制器)、电磁阀等外设供电
具备抗干扰能力和高可靠性
英文资料:
TEL Tokyo Electron 3208-000029-12 power module
(Power Supply Module)
Product type and function:
This module is a dedicated power module in Tokyo Electron semiconductor equipment, mainly responsible for providing stable DC/AC power output for the control circuit, actuator, sensing system, etc. of the equipment. It has the following functional characteristics:
Voltage conversion (such as AC-DC, DC-DC)
Power filtering and voltage stabilization to ensure output voltage stability
Provide protection mechanisms for short circuits, overcurrent, overvoltage, etc
Some versions may support multiple output power supply
Main application areas:
1. Power supply system for semiconductor manufacturing equipment
Power supply for process modules such as Etcher, CVD/PVD, Lithography, etc
Provide low-voltage DC power supply (such as+5V,+12V,+24V) for the main control board, I/O modules, sensors, actuators, etc
2. Control system power core
As the core power source for key modules such as PLC, main controller, and motor driver inside TEL equipment
Support long-term stable operation and adapt to high-precision manufacturing requirements
3. Communication and interface power supply guarantee
Power supply to RS-232/RS-485 interface, optoelectronic isolation module, and network communication module
Ensure that system data transmission is not affected by power fluctuations
4. Vacuum system and actuator support
Power supply for external devices such as vacuum pump control circuit, MFC (Mass Flow Controller), solenoid valve, etc
Capable of anti-interference and high reliability
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218