TEL Tokyo Electron CT2980-092273-11传感器模块

TEL Tokyo Electron  CT2980-092273-11传感器模块

1.产 品 资 料 介 绍：

产品名称：

TEL Tokyo Electron CT2980-092273-11 传感器模块
（Sensor Module）

产品定义与功能：

该模块是 Tokyo Electron（东京电子）在其半导体设备中使用的高精度传感器集成单元，用于实时监测设备运行状态或加工环境参数。其核心功能包括：

• 检测与采集：监控关键物理量（如位置、温度、压力、真空度、流量、对位状态等）

• 信号转换：将模拟信号转换为数字信号并传输至控制系统

• 数据反馈：提供实时反馈用于闭环控制与设备保护

• 集成通信：与主控系统、PLC 或 I/O 模块通信，支持设备内部逻辑联动

主要应用领域：

1. 晶圆处理监测

• 用于晶圆在传输、装载、对准等过程中的位置和状态检测

• 常配合 EFEM、Load Port、Transfer Module 使用，提升操作精度与稳定性

2. 真空/气体控制系统

• 监测腔体内真空度、气体流量或气压变化

• 与 MFC（质量流量控制器）、真空阀等设备联动，实现安全联锁控制

3. 温度与环境监测

• 用于加热模块、冷却装置或等离子处理区域的温度检测

• 保障工艺过程参数在稳定范围内运行

4. 自动化故障诊断与报警

• 实现故障状态检测（如门未闭合、对位失败、气压异常）

• 支持设备自检、远程报警和日志记录功能

英文资料：

TEL Tokyo Electron CT2980-092273-11 Sensor Module

（Sensor Module）

Product definition and functionality:

This module is a high-precision sensor integrated unit used by Tokyo Electron in its semiconductor equipment for real-time monitoring of equipment operating status or processing environment parameters. Its core functions include:

Detection and collection: Monitor key physical quantities (such as position, temperature, pressure, vacuum degree, flow rate, alignment status, etc.)

Signal conversion: Convert analog signals into digital signals and transmit them to the control system

Data feedback: Provide real-time feedback for closed-loop control and equipment protection

Integrated communication: communicates with the main control system, PLC or I/O module, supports internal logical linkage of equipment

Main application areas:

1. Wafer processing monitoring

Used for detecting the position and status of wafers during transportation, loading, alignment, and other processes

Frequently used in conjunction with EFEM, Load Port, and Transfer Module to improve operational accuracy and stability

2. Vacuum/gas control system

Monitor the vacuum degree, gas flow rate, or pressure changes inside the chamber

Linkage with MFC (Mass Flow Controller), vacuum valve and other equipment to achieve safety interlock control

3. Temperature and environmental monitoring

Temperature detection for heating modules, cooling devices, or plasma processing areas

Ensure that the process parameters operate within a stable range

4. Automated fault diagnosis and alarm

Implement fault state detection (such as door not closed, alignment failure, abnormal air pressure)

Support device self check, remote alarm, and logging functions

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218