TEL Tokyo Electron 3380-007053-13单板计算机

TEL Tokyo Electron  3380-007053-13单板计算机

1.产 品 资 料 介 绍：

产品名称：

TEL Tokyo Electron 3380-007053-13 单板计算机
（Single Board Computer, SBC）

产品功能：

该单板计算机是 Tokyo Electron 半导体设备中的核心计算与控制平台，集成了处理器、内存、存储、输入输出接口于一体，主要功能包括：

• 运行设备控制系统的软件与固件，实现工艺流程管理

• 采集、处理设备传感器数据，实现闭环控制

• 负责与设备各子模块（I/O 板、驱动模块、传感器模块等）通信协调

• 提供网络接口，实现与上位机系统或工厂制造执行系统（MES）交互

• 支持实时操作系统（RTOS）或嵌入式 Linux 等操作环境

主要应用领域：

1. 半导体制造设备核心控制

• 作为 Etcher、CVD、PVD 等设备的主控平台

• 控制工艺参数、设备动作、数据采集与记录

2. 自动化与流程管理

• 执行设备动作序列与工艺流程逻辑

• 支持设备自诊断、故障处理与报警管理

3. 数据通信与网络接口

• 与工厂自动化系统、制造执行系统（MES）进行数据交换

• 支持工业以太网、串口、CAN 总线等多种通信协议

4. 设备状态监控与优化

• 实时监控设备运行状况，支持远程维护与升级

• 提供系统日志、历史数据存储与分析接口

英文资料：

TEL Tokyo Electron 3380-007053-13 Single Board Computer

（Single Board Computer, SBC）

Product Features:

This single board computer is the core computing and control platform in Tokyo Electron semiconductor equipment, integrating a processor, memory, storage, and input/output interfaces. Its main functions include:

Run the software and firmware of the equipment control system to achieve process management

Collect and process device sensor data to achieve closed-loop control

Responsible for communication and coordination with various sub modules of the equipment (I/O board, driver module, sensor module, etc.)

Provide network interfaces to enable interaction with upper computer systems or factory manufacturing execution systems (MES)

Support real-time operating systems (RTOS) or embedded Linux and other operating environments

Main application areas:

1. Core control of semiconductor manufacturing equipment

As the main control platform for Etcher, CVD, PVD and other equipment

Control process parameters, equipment actions, data collection and recording

2. Automation and Process Management

Execute device action sequence and process logic

Support device self diagnosis, fault handling, and alarm management

3. Data communication and network interface

Exchange data with factory automation systems and manufacturing execution systems (MES)

Supports multiple communication protocols such as industrial Ethernet, serial port, CAN bus, etc

4. Equipment status monitoring and optimization

Real time monitoring of device operation status, supporting remote maintenance and upgrades

Provide system logs, historical data storage and analysis interfaces

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218