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TEL Tokyo Electron 3M10-151466-11控制器组件

发布时间:2025-07-09人气:
  • TEL Tokyo Electron 3M10-151466-11控制器组件
  • TEL Tokyo Electron 3M10-151466-11控制器组件
  • TEL Tokyo Electron 3M10-151466-11控制器组件

TEL Tokyo Electron  3M10-151466-11控制器组件

1.产 品 资 料 介 绍:

产品名称:

TEL Tokyo Electron 3M10-151466-11 控制器组件
(Controller Assembly)


产品功能简介:

该控制器组件是 TEL(Tokyo Electron)用于半导体设备中的模块化控制核心单元,集成了主控电路、通信接口和执行信号逻辑,承担设备运行过程中的指令处理和设备动作控制任务。

其典型功能包括:

  • 管理晶圆传输、工艺处理、真空操作等子系统的控制流程

  • 实时采集传感器输入(如温度、压力、位置)并做出逻辑判断

  • 驱动电机、阀门、加热单元等执行装置

  • 与主控平台(如 SBC 或 PLC)进行高速通信并同步状态

  • 提供接口板、继电器、电源模块等组件的一体化结构,便于安装和维护


可能集成功能模块:

  • 微控制器或工业 CPU

  • 数字量输入/输出(DI/DO)接口

  • 模拟量信号采集(AI)

  • 通信模块(如 CAN、RS-232/485、Ethernet)

  • 故障检测与报警电路

  • EMI/ESD 电气保护结构

英文资料:

TEL Tokyo Electron 3M10-151466-11 Controller Component

(Controller Assembly)


Product Function Introduction:

This controller component is a modular control core unit used by TEL (Tokyo Electron) in semiconductor devices, integrating main control circuits, communication interfaces, and execution signal logic, responsible for instruction processing and device action control tasks during device operation.


Its typical functions include:


Manage the control process of subsystems such as wafer transfer, process handling, vacuum operation, etc


Real time collection of sensor inputs (such as temperature, pressure, position) and making logical judgments


Execution devices such as drive motors, valves, heating units, etc


High speed communication and status synchronization with the main control platform (such as SBC or PLC)


Provide an integrated structure of interface boards, relays, power modules, and other components for easy installation and maintenance


Possible integrated functional modules:

Microcontrollers or industrial CPUs


Digital input/output (DI/DO) interface


Analog signal acquisition (AI)


Communication modules (such as CAN, RS-232/485, Ethernet)


Fault detection and alarm circuit


EMI/ESD electrical protection structure

2.产      品      展      示      

3m10-151466-11_block_inlet_tokyo_electron_tel_3.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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