TEL Tokyo Electron 2L39-000066-31温度控制器

TEL Tokyo Electron  2L39-000066-31温度控制器

1.产 品 资 料 介 绍：

产品名称：

TEL Tokyo Electron 2L39-000066-31 温度控制器
（Temperature Controller）

产品功能简介：

该温度控制器是 Tokyo Electron（TEL）半导体制造设备中的关键控制单元，用于实现对设备内部关键部件或工艺腔体的精准温度调节。主要功能包括：

• 采集热电偶、热阻（RTD）等温度传感器的信号

• 通过 PID 控制算法实现加热器或冷却系统的精准温度调节

• 提供多段温度设定与自动切换功能，适应复杂工艺需求

• 具备过温报警、异常保护与故障诊断功能

• 支持与主控系统的通信接口，实现远程监控与参数调整

主要应用领域：

1. 半导体工艺腔体温度控制

• 精准控制 CVD、PVD、蚀刻等设备反应腔内的温度环境

• 确保工艺过程的温度稳定性，提高产品良率

2. 晶圆处理设备加热单元

• 管理晶圆平台、对位台、载具的加热与温度维护

• 控制预热器、温度均衡装置的运行状态

3. 真空系统温度管理

• 控制真空阀体、管路或密封件的温度，防止结露或材料变形

• 确保系统运行的环境安全与稳定

英文资料：

TEL Tokyo Electron 2L39-00006-31 Temperature Controller

（Temperature Controller）

Product Function Introduction:

This temperature controller is a key control unit in Tokyo Electron (TEL) semiconductor manufacturing equipment, used to achieve precise temperature regulation of key components or process chambers inside the equipment. The main functions include:

Collect signals from temperature sensors such as thermocouples and thermal resistance detectors (RTDs)

Accurate temperature regulation of heaters or cooling systems through PID control algorithm

Provide multiple temperature settings and automatic switching functions to meet complex process requirements

Equipped with over temperature alarm, abnormal protection, and fault diagnosis functions

Support communication interface with the main control system to achieve remote monitoring and parameter adjustment

Main application areas:

1. Temperature control of semiconductor process chamber

Accurately control the temperature environment inside the reaction chamber of CVD, PVD, etching and other equipment

Ensure temperature stability during the manufacturing process and improve product yield

2. Heating unit of wafer processing equipment

Manage the heating and temperature maintenance of wafer platforms, alignment stations, and carriers

Control the operation status of preheater and temperature balance device

3. Temperature management of vacuum system

Control the temperature of vacuum valve bodies, pipelines, or seals to prevent condensation or material deformation

Ensure the safety and stability of the system's operating environment

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218