Advanced Energy 3Z39-000011-V1射频控制器
1.产 品 资 料 介 绍：
Advanced Energy 3Z39-000011-V1 射频控制器
开头：Advanced Energy 3Z39-000011-V1 用于半导体设备射频调控，性能稳定。
功率控制精准，等离子工艺效果统一
自带自动阻抗匹配，调试省时
过温、过载、驻波异常自动保护停机
支持远程通讯，可远程修改工艺参数
内置多组工艺配方，一键切换使用
散热效果好，长时间满载运行不高温
故障自检，指示灯快速排查问题
软启动输出，减少设备瞬间冲击损耗
金属屏蔽外壳，抗现场电磁干扰
标准导轨安装，拆装维护便捷
高低温车间环境均可稳定工作
强弱电线路分离，无信号互相干扰
输出谐波低，不干扰周边传感元件
实时采集功率数据，方便工艺追溯
完美适配 AE 原厂射频电源，兼容性强
结尾：Advanced Energy 3Z39-000011-V1 操控稳定，是半导体工艺常用射频控制配件。
Advanced Energy 3Z39-000011-V1射频控制器 产品英文
Advanced Energy 3Z39-00011-V1 RF Controller
Introduction: Advanced Energy 3Z39-000011-V1 is used for RF control of semiconductor equipment, with stable performance.
Accurate power control and unified plasma process effect
Equipped with automatic impedance matching, debugging is time-saving
Automatic protection shutdown for overheating, overload, and standing wave anomalies
Support remote communication and enable remote modification of process parameters
Built in multiple process formulas, one click switch for use
Good heat dissipation effect, long-term full load operation without high temperature
Fault self check, quick troubleshooting of indicator lights
Soft start output, reducing equipment instantaneous impact losses
Metal shielding shell, resistant to on-site electromagnetic interference
Standard guide rail installation, easy disassembly and maintenance
Stable operation in both high and low temperature workshop environments
Separation of strong and weak electrical lines, no signal interference with each other
Low output harmonic, does not interfere with surrounding sensing components
Real time collection of power data for easy process traceability
Perfectly compatible with AE factory RF power supply, strong compatibility
Conclusion: Advanced Energy 3Z39-000011-V1 has stable operation and is a commonly used RF control component in semiconductor processes.
Advanced Energy 3Z39-000011-V1射频控制器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
