TEL Tokyo Electron 3Z39-000005-V1自动匹配器
1.产 品 资 料 介 绍：
产品名称：
产品名称
TEL Tokyo Electron 3Z39-000005-V1 自动匹配器
产品类型
射频自动阻抗匹配器（RF Auto Matcher）
设备功能
该模块用于 Tokyo Electron 半导体设备中，主要用于：
在高频射频系统中执行自动阻抗匹配
确保 RF 发射器与等离子体负载之间的阻抗最优化
降低反射功率，提高能量耦合效率
保护 RF 发射器、等离子腔体、匹配网络等关键部件
典型应用
适用于 Tokyo Electron 的刻蚀、CVD、ALD 等工艺系统，通常与 Daihen 等品牌的射频电源配套使用。常见于：
Clean Track 系统
真空腔体内的等离子控制模块
需要高速响应的射频控制场景
技术参数（可能对应 Daihen RMN-20K3-V）
工作频率：13.56 MHz 或其他高频工业标准
功率支持范围：最多可达 20kW（具体视版本而定）
自动控制：具备实时反馈匹配算法
接口标准：工业标准射频接口，可与 TEL 原厂或第三方 RF 系统集成
英文资料：
product name
TEL Tokyo Electron 3Z39-000005-V1 Automatic Matcher
product type
RF Auto Matcher
Equipment functions
This module is used in Tokyo Electron semiconductor equipment, mainly for:
Performing automatic impedance matching in high-frequency RF systems
Ensure optimal impedance between RF transmitter and plasma load
Reduce reflection power and improve energy coupling efficiency
Protect key components such as RF transmitters, plasma chambers, and matching networks
Typical applications
Suitable for etching, CVD, ALD and other process systems of Tokyo Electron, usually used in conjunction with RF power supplies from brands such as Daihen. Commonly seen in:
Clean Track System
Plasma control module inside the vacuum chamber
RF control scenarios that require high-speed response
Technical parameters (possibly corresponding to Daihen RMN-20K3-V)
Operating frequency: 13.56 MHz or other high-frequency industry standards
Power support range: up to 20kW (depending on version)
Automatic control: equipped with real-time feedback matching algorithm
Interface standard: Industrial standard RF interface, can be integrated with TEL original or third-party RF systems
2.产 品 展 示
3.其他产品
4.其他英文产品
HAAS 93-32-3550J Intelligent Driver
ABB CHBX01R 2VAA008575R1 redundant modul
Schneider 140CP43412A Controller Module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
