TEL Tokyo Electron MB3M36-050151-11真空计

TEL Tokyo Electron  MB3M36-050151-11真空计

1.产 品 资 料 介 绍：

产品名称：

Tokyo Electron (TEL) MB3M36-050151-11 真空计 — 产品应用领域详解

一、产品功能定位

MB3M36-050151-11 真空计是用于测量和监控真空环境压力的精密仪器，广泛集成于 Tokyo Electron 半导体设备中。其主要职责是实时反馈真空腔体或气路系统中的压强状态，确保工艺流程在理想的气压条件下运行。

二、主要应用领域

1. 半导体制造设备的真空状态监控

• 应用设备类型：

  • 刻蚀机（Etcher）

  • 化学气相沉积设备（CVD、ALD）

  • 清洗系统、真空负载锁、腔体反应系统等

• 功能说明：
  通过连接到反应腔、前级泵、涡轮泵入口或真空管道，实现从常压到超高真空（10⁻⁶ Pa）范围的精准测量。

2. 工艺真空控制闭环系统的核心传感器

• 与系统联动：
  与真空控制器、排气系统（如涡轮分子泵、干泵）协同，形成闭环控制回路，实现自动抽气、稳压与放气。

• 压力设定阈值触发：
  可在设定压力范围内启/停泵系统，或联动阀门控制单元。

英文资料：

Tokyo Electron (TEL) MB3M36-050151-11 Vacuum Gauge - Detailed Explanation of Product Application Fields

1、 Product functional positioning

MB3M36-050151-11 vacuum gauge is a precision instrument used for measuring and monitoring vacuum environmental pressure, widely integrated into Tokyo Electron semiconductor equipment. Its main responsibility is to provide real-time feedback on the pressure status in the vacuum chamber or gas system, ensuring that the process operates under ideal pressure conditions.

2、 Main application areas

1. Vacuum state monitoring of semiconductor manufacturing equipment

Application device type:

Etcher (Etcher)

Chemical vapor deposition equipment (CVD, ALD)

Cleaning system, vacuum load lock, chamber reaction system, etc

Function Description:

Accurate measurement from atmospheric pressure to ultra-high vacuum (10 ⁻⁶ Pa) can be achieved by connecting to the reaction chamber, pre pump, turbo pump inlet, or vacuum pipeline.

2. Core sensors of process vacuum control closed-loop system

Linkage with the system:

Collaborate with vacuum controllers and exhaust systems (such as turbo molecular pumps and dry pumps) to form a closed-loop control loop, achieving automatic pumping, stabilization, and deflation.

Pressure setting threshold trigger:

The pump system can be started/stopped within the set pressure range, or linked to a valve control unit.

2.产      品      展      示      

3.其他产品

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FOXBORO FBM217 Voltage Monitor Module 

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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