1.产 品 资 料 介 绍：
NOVELLUS 02-425998-00 机器人控制器
- 闭环伺服控制，机械手定位精度高
- S 型加减速算法，搬运晶圆降低碎裂风险
- 多路隔离 IO 接口，对接限位、真空传感器
- 电路板电磁屏蔽，无尘车间抗干扰稳定运行
- 直流宽压输入，供电波动不中断作业
- 碰撞、过载、超温多重安全保护机制
- 内置多组搬运程序，可快速切换不同工艺
- 支持示教盒操作，点位编辑调试简单
- 分块模块化板卡，故障更换维修速度快
- 多轴同步联动，适配伸缩型晶圆机械手
- 整机自检功能，故障代码快速排查问题
- 金属防尘壳体，适配设备密闭机柜安装
- 工业通讯端口，可接入产线中控系统
- 低发热低功耗，支持全天 24 小时连续运转
- 匹配多款 NOVELLUS 薄膜沉积设备，替换通用性好结尾：NOVELLUS 02-425998-00 安全稳定、调试维护简便，是半导体晶圆传输机械手核心控制部件。
NOVELLUS 02-425998-00 机器人控制器 产品英文
NOVELLUS 02-425998-00 Robot Controller
Introduction: NOVELLUS 02-425998-00 is a specialized controller for semiconductor wafer transfer robots, which controls smoothly and adapts to coating equipment. Its core features are as follows:
Closed loop servo control, high positioning accuracy of robotic arm
S-shaped acceleration and deceleration algorithm reduces the risk of wafer fragmentation during wafer handling
Multi channel isolated IO interface, compatible with limit and vacuum sensors
Circuit board electromagnetic shielding, dust-free workshop anti-interference and stable operation
DC wide voltage input, uninterrupted operation due to power supply fluctuations
Multiple safety protection mechanisms for collision, overload, and overheating
Built in multiple handling programs, allowing for quick switching between different processes
Support teaching box operation, simple point editing and debugging
Block modular board, fast fault replacement and maintenance speed
Multi axis synchronous linkage, compatible with telescopic wafer manipulator
Whole machine self check function, quick troubleshooting of fault codes
Metal dustproof shell, suitable for installation in equipment enclosed cabinets
Industrial communication port, capable of connecting to the central control system of the production line
Low heat generation and low power consumption, supporting continuous operation 24 hours a day
Match multiple NOVELLUS thin film deposition equipment, with good versatility for replacement
Conclusion: NOVELLUS 02-425998-00 is a safe, stable, and easy to debug and maintain core control component for semiconductor wafer transfer robots.
NOVELLUS 02-425998-00 机器人控制器 产品展示
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| K32HCHJ-LEK-M2-01 | 6SC6101-3A-Z | IMASI23 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
