AMAT Applied Materials 03-81723-00电机驱动器总成模块

AMAT Applied Materials  03-81723-00电机驱动器总成模块

1.产 品 资 料 介 绍：

产品应用领域

1. 半导体制造设备运动控制

   • 应用于 AMAT 的沉积（CVD、PVD）、刻蚀、离子注入等工艺设备。

   • 负责驱动设备内部的电机，完成精准的机械运动控制。

2. 晶圆搬运与传输系统

   • 在晶圆由加载端到工艺腔体、再到卸载端的传输过程中，电机驱动器控制搬运机械臂的旋转、升降与抓取动作。

   • 保证晶圆在真空腔体或大气环境中稳定、无颗粒污染地传输。

3. 阀门与真空腔门的启闭控制

   • 用于驱动腔体的开关阀门、滑板门（Slit Valve）等机械部件。

   • 确保腔体之间真空隔离或工艺切换时的高可靠启闭动作。

4. 晶圆对准与旋转系统

   • 应用于晶圆定向器（Orienter）和旋转台，帮助晶圆在工艺前进行方向和位置的精确对准。

5. 载片盒与工艺托盘机构

   • 控制晶圆载片盒的进出、定位和搬运。

   • 驱动器为托盘、夹具等部件提供运动动力，实现自动化装卸片功能。

AMAT Applied Materials 03-81723-00电机驱动器总成模块 英文资料：

Product application areas

Motion Control of Semiconductor Manufacturing Equipment

Applied to AMAT's deposition (CVD, PVD), etching, ion implantation and other process equipment.

Responsible for driving the internal motors of the equipment and achieving precise mechanical motion control.

Wafer Handling and Transport System

During the transfer of wafers from the loading end to the process chamber and then to the unloading end, the motor driver controls the rotation, lifting, and gripping actions of the handling robotic arm.

Ensure stable and particle free transfer of wafers in vacuum chambers or atmospheric environments.

Opening and closing control of valves and vacuum chamber doors

Mechanical components such as switch valves and slide valves used to drive the chamber.

Ensure highly reliable opening and closing actions during vacuum isolation or process switching between chambers.

Wafer Alignment and Rotation System

Applied to wafer orienters and rotary tables, it helps to accurately align the direction and position of wafers before processing.

Carrier box and process tray mechanism

Control the entry, exit, positioning, and handling of wafer carriers.

The driver provides motion power for components such as trays and fixtures, achieving automated loading and unloading functions.

AMAT Applied Materials 03-81723-00电机驱动器总成模块 产品展示      

 产品视频

3.其他产品

HORNER ELECTRIC HE693ADC420隔离模拟电流输入模块
Horner Electric HE693MPXCBL适配器电缆
Horner Electric HE693THM884M输入模块

4.其他英文产品

ALSTOM AH116-2 Control card
ALSTOM AS111-1 Control card
YOKOGAWA ATK4A-00 terminal

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218