AMAT DIP-280-015互锁模块

AMAT  DIP-280-015互锁模块

1.产 品 资 料 介 绍：

AMAT DIP-280-015 互锁模块

产品概述

AMAT（Applied Materials）DIP-280-015 互锁模块是一种用于半导体制造设备的 安全控制与互锁单元。它通过逻辑互锁和信号监控，确保设备在运行、维护或异常情况下能够安全操作。互锁模块主要用于防止腔体、控制箱或关键工艺模块在不安全状态下被开启或操作，从而保护设备、工艺和操作人员安全。

技术参数（典型方向，具体数据需参考原厂资料）

• 控制方式：逻辑互锁，支持硬件和电子信号输入

• 接口类型：数字输入/输出接口，可与设备控制系统和安全系统连接

• 信号类型：状态检测、门锁信号、故障报警

• 安装方式：模块化，可集成于控制箱或底盘

• 环境适应性：耐高温、耐振动，适应半导体设备洁净室环境

应用场景

1. 设备腔体安全控制

   • 防止反应腔、真空腔或加工模块在异常状态下开启

   • 保证工艺过程和人员操作安全

2. 控制箱与底盘控制箱安全保护

   • 监控控制箱门、模块锁状态

   • 与设备控制系统联动，实现异常停机或报警

3. 沉积工艺（CVD/PVD/ALD）

   • 在沉积腔体维护或操作时提供安全互锁

   • 防止误操作引发设备损坏或工艺异常

4. 刻蚀工艺设备

   • 对刻蚀腔体和气动系统进行安全互锁

   • 保证设备运行期间操作安全

5. 工厂自动化与安全管理

   • 与上位控制系统结合，实现远程监控和安全管理

   • 提供设备状态指示和异常报警功能

AMAT   DIP-280-015互锁模块 英文资料：

AMAT DIP-280-015 Interlock Module

Product Overview

The AMAT (Applied Materials) DIP-280-015 interlock module is a safety control and interlock unit used in semiconductor manufacturing equipment. It ensures safe operation of equipment during operation, maintenance, or abnormal situations through logical interlocking and signal monitoring. Interlocking modules are mainly used to prevent cavities, control boxes, or critical process modules from being opened or operated in an unsafe state, thereby protecting the safety of equipment, processes, and operators.

Technical parameters (typical direction, specific data should refer to the original factory information)

Control mode: Logic interlock, supporting hardware and electronic signal input

Interface type: Digital input/output interface, can be connected to device control system and security system

Signal types: status detection, door lock signal, fault alarm

Installation method: modular, can be integrated into the control box or chassis

Environmental adaptability: high temperature resistance, vibration resistance, suitable for semiconductor equipment cleanroom environment

Application scenarios

Equipment cavity safety control

Prevent the reaction chamber, vacuum chamber, or processing module from opening in abnormal conditions

Ensure the safety of the process and personnel operation

Control box and chassis control box safety protection

Monitor the status of control box doors and module locks

Integrate with the equipment control system to achieve abnormal shutdown or alarm

Deposition process (CVD/PVD/ALD)

Provide safety interlocks during maintenance or operation of sedimentation chambers

Prevent equipment damage or process abnormalities caused by misoperation

Etching process equipment

Safely interlock the etching chamber and pneumatic system

Ensure safe operation during equipment operation

Factory Automation and Safety Management

Combining with the upper control system to achieve remote monitoring and safety management

Provide device status indication and abnormal alarm function

AMAT  DIP-280-015互锁模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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