AMAT 0100-09026通信模块

AMAT  0100-09026通信模块

1.产 品 资 料 介 绍：

AMAT 0100-09026 通信模块

产品概述

AMAT（Applied Materials）0100-09026 通信模块是一种用于半导体制造设备的 数据传输与网络接口模块。它负责设备内部控制器、传感器、执行模块与上位控制系统（如工厂自动化系统或监控系统）之间的数据通信，确保工艺参数、设备状态和监控信息的实时交换。该模块是实现设备联网、远程监控和自动化管理的重要组件。

技术参数（典型方向，具体数据需参考原厂资料）

• 通信类型：工业标准网络协议（如Ethernet/IP、RS-232/485等）

• 数据速率：适应实时工艺数据传输需求

• 接口：多路输入/输出接口，支持设备内部模块和上位系统连接

• 控制方式：通过控制器或上位系统进行数据交换和管理

• 安装方式：模块化设计，便于集成到控制箱或底盘

• 环境适应性：适应半导体设备洁净室及工业温度范围

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 实现加热器、泵浦、气体阀门、传感器与控制器之间的数据通信

   • 支持工艺参数实时监控和调节

2. 刻蚀工艺设备

   • 连接射频模块、流量控制模块和压力传感器

   • 提供稳定的数据通路，保证刻蚀工艺精度

3. 离子注入系统

   • 数据传输离子源、扫描系统及束流监测模块

   • 确保注入剂量和均匀性可控

4. 控制箱与底盘控制箱

   • 作为设备内部网络通信的核心节点

   • 支持模块间协调运行和远程监控

5. 工厂自动化与安全管理

   • 与上位系统、互锁系统和监控平台集成

   • 实现远程操作、数据记录和异常报警

AMAT  0100-09026通信模块 英文资料：

AMAT 0100-09026 Communication Module

Product Overview

AMAT (Applied Materials) 0100-09026 communication module is a data transmission and network interface module used in semiconductor manufacturing equipment. It is responsible for data communication between the internal controllers, sensors, execution modules, and upper control systems (such as factory automation systems or monitoring systems) of the equipment, ensuring real-time exchange of process parameters, equipment status, and monitoring information. This module is an important component for implementing device networking, remote monitoring, and automated management.

Technical parameters (typical direction, specific data should refer to the original factory information)

Communication type: Industrial standard network protocol (such as Ethernet/IP, RS-232/485, etc.)

Data rate: Suitable for real-time process data transmission requirements

Interface: Multi channel input/output interface, supporting connection between internal modules of the device and the upper system

Control method: Data exchange and management through the controller or upper system

Installation method: Modular design, easy to integrate into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature ranges

Application scenarios

Deposition process (CVD/PVD/ALD)

Realize data communication between heaters, pumps, gas valves, sensors, and controllers

Support real-time monitoring and adjustment of process parameters

Etching process equipment

Connect the RF module, flow control module, and pressure sensor

Provide a stable data path to ensure the accuracy of the etching process

Ion implantation system

Data transmission ion source, scanning system, and beam monitoring module

Ensure controllable injection dose and uniformity

Control box and chassis control box

As the core node for internal network communication of the device

Support coordinated operation and remote monitoring between modules

Factory Automation and Safety Management

Integrate with the upper system, interlock system, and monitoring platform

Implement remote operation, data recording, and abnormal alarm

AMAT 0100-09026通信模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218