AMAT 0226-31128信号灯模块
1.产 品 资 料 介 绍:
AMAT 0226-31128 信号灯模块
产品概述
AMAT(Applied Materials)0226-31128 信号灯模块是一种用于半导体制造设备的 状态指示与报警模块。它通过不同颜色的灯光显示设备或工艺状态,如运行、故障、待机或维护状态。信号灯模块可与控制系统和互锁系统集成,实现直观的视觉反馈,帮助操作人员快速识别设备状态,提升工艺安全性和操作效率。
技术参数(典型方向,具体数据需参考原厂资料)
指示类型:多色灯光显示(常见红、黄、绿)
控制方式:通过控制系统或互锁信号驱动
接口:兼容设备控制系统的数字或模拟输出
安装方式:模块化,可固定在控制箱、设备面板或关键位置
环境适应性:适应洁净室及工业环境,耐高温和振动
应用场景
沉积工艺(CVD/PVD/ALD)
显示设备运行状态或工艺阶段
提示操作人员薄膜沉积过程中的异常或警告
刻蚀工艺设备
指示刻蚀腔体或气体流量控制模块状态
提醒维护人员注意工艺异常
离子注入系统
实时显示注入模块或扫描系统状态
辅助操作人员快速判断注入过程是否正常
控制箱与底盘控制箱
提供整体设备或子模块的状态指示
与互锁系统联动,实现安全提示和异常报警
工厂自动化与安全管理
可作为远程监控和可视化管理的一部分
提高操作安全性和工艺管理效率
AMAT 0226-31128信号灯模块 英文资料:
AMAT 0226-31128 Signal Light Module
Product Overview
AMAT (Applied Materials) 0226-31128 signal light module is a status indication and alarm module used in semiconductor manufacturing equipment. It displays the device or process status, such as running, fault, standby, or maintenance status, through lights of different colors. The signal light module can be integrated with the control system and interlock system to achieve intuitive visual feedback, helping operators quickly identify equipment status and improve process safety and operational efficiency.
Technical parameters (typical direction, specific data should refer to the original factory information)
Indication type: multi-color light display (commonly red, yellow, green)
Control method: driven by control system or interlock signal
Interface: Compatible with digital or analog outputs of device control systems
Installation method: Modular, can be fixed in control boxes, equipment panels, or key positions
Environmental adaptability: Suitable for clean rooms and industrial environments, resistant to high temperatures and vibrations
Application scenarios
Deposition process (CVD/PVD/ALD)
Display device operating status or process stage
Notify operators of abnormalities or warnings during the thin film deposition process
Etching process equipment
Indicate the status of the etching chamber or gas flow control module
Remind maintenance personnel to pay attention to process abnormalities
Ion implantation system
Real time display of injection module or scanning system status
Assist operators in quickly determining whether the injection process is normal
Control box and chassis control box
Provide status indication of the overall device or submodule
Linkage with the interlocking system to achieve security alerts and abnormal alarms
Factory Automation and Safety Management
Can be used as part of remote monitoring and visual management
Improve operational safety and process management efficiency
AMAT 0226-31128信号灯模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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