AMAT Applied Materials 0120-93660导管PCB卡

AMAT Applied Materials  0120-93660导管PCB卡

1.产 品 资 料 介 绍：

产品概述

AMAT 0120-93660 导管 PCB 卡是 Applied Materials 半导体离子注入设备中的关键电子模块。该卡板安装在离子注入系统的导管（Guiding Tube）部分，用于控制、监测和信号处理。它在离子束传输与对准过程中起到重要作用，确保束流路径稳定、均匀，并维持工艺的高精度和一致性。

技术参数（推断与行业常规）

• 功能类型：导管控制与监测电路板

• 适用设备：Quantum X 单晶圆高电流离子注入系统及相关机型

• 电源供给：常见为低压直流（如 24V DC 或 ±15V DC）

• 信号接口：模拟与数字混合信号接口，支持传感器输入和控制输出

• 监控内容：电压、电流、温度、导管位置或束流相关参数

• 工作环境：洁净室、真空或低压环境下稳定运行

• 可靠性设计：抗电磁干扰、耐离子束环境、支持长期连续运行

应用场景

1. 离子束引导控制

   • 协助导管对离子束进行偏转、聚焦和路径调节，保证束流均匀注入晶圆。

2. 工艺监测与反馈

   • 采集导管中传感器信号，监控电气状态与运行参数，并实时反馈给上位机控制系统。

3. 安全与保护

   • 检测异常情况（如过热、电压波动、信号失真），触发保护逻辑，确保设备与晶圆安全。

4. 精度与稳定性提升

   • 通过精细化控制离子束传输路径，提高掺杂工艺的一致性与生产良率。

产品优势

• 高匹配性：为 AMAT Quantum X 设备专门设计，易于更换与集成。

• 高精度控制：保证离子束导向精度，提升半导体加工质量。

• 可靠稳定：能在真空和高电磁干扰环境中长期稳定工作。

• 模块化设计：支持快速维护和更换，减少设备停机时间。

• 监控与保护功能：集成状态监测与故障防护，增强系统安全性。

AMAT Applied Materials 0120-93660导管PCB卡 英文资料：

Product Overview

AMAT 0120-93660 catheter PCB card is a key electronic module in Applied Materials semiconductor ion implantation equipment. This card board is installed in the Guiding Tube section of the ion implantation system for control, monitoring, and signal processing. It plays an important role in ion beam transmission and alignment, ensuring stable and uniform beam paths, and maintaining high precision and consistency of the process.

Technical parameters (inference and industry norms)

Function type: Catheter control and monitoring circuit board

Applicable equipment: Quantum X single crystal circular high current ion implantation system and related models

Power supply: commonly low voltage direct current (such as 24V DC or ± 15V DC)

Signal interface: analog and digital mixed signal interface, supporting sensor input and control output

Monitoring content: voltage, current, temperature, conduit position or beam related parameters

Working environment: Stable operation in clean room, vacuum or low-pressure environment

Reliability design: resistant to electromagnetic interference, ion beam environment, and supports long-term continuous operation

Application scenarios

Ion beam guidance control

Assist the catheter in deflection, focusing, and path adjustment of the ion beam to ensure uniform beam injection into the wafer.

Process monitoring and feedback

Collect sensor signals from the catheter, monitor electrical status and operating parameters, and provide real-time feedback to the upper computer control system.

Security and protection

Detect abnormal situations (such as overheating, voltage fluctuations, signal distortion), trigger protection logic, and ensure the safety of equipment and wafers.

Improved accuracy and stability

By finely controlling the ion beam transmission path, the consistency and production yield of doping processes can be improved.

Product advantages

High compatibility: Specially designed for AMAT Quantum X equipment, easy to ｒｅｐｌａｃｅ and integrate.

High precision control: ensuring the accuracy of ion beam guidance and improving the quality of semiconductor processing.

Reliable and stable: capable of long-term stable operation in vacuum and high electromagnetic interference environments.

Modular design: supports rapid maintenance and replacement, reducing equipment downtime.

Monitoring and protection functions: Integrate status monitoring and fault protection to enhance system security.

AMAT Applied Materials 0120-93660导管PCB卡 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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