AMAT Applied Materials 0090-06421控制器
1.产 品 资 料 介 绍：
核心规格
功能特点
典型应用
AMAT Applied Materials 0090-06421控制器 英文资料：
AMAT Applied Materials 0090-06421 is a modular industrial controller primarily used for real-time control and coordination of parameters such as motion, temperature, and gas flow in semiconductor manufacturing equipment. It is compatible with multi chamber platforms such as Centura, Endura, and P5000.
Core specifications
Project specification remarks
Suitable for multi chamber process systems such as Centura, Endura, P5000, Producer, etc
Control types include motion control, temperature control, gas flow control, and support for mixed control
Communication interfaces SECS/GEM, EtherNet, RS-485, Profibus support factory automation
32-bit RISC processor/system; VxWorks real-time operating system ensures high-precision timing
Power input 24 VDC (redundant input) improves reliability
Working temperature: 0 ℃~40 ℃ (some require derating) Natural air cooling
Size standard 1U/2U rack mounted or PCB plug-in for easy installation
Certified CE, UL, SEMI S2 in compliance with semiconductor industry standards
Expansion capability supports flexible configuration of I/O, communication, and specialized functional module expansion
Features
Multi parameter collaborative control: It can simultaneously manage wafer transfer, process chamber temperature, gas flow rate, etc., ensuring synchronous execution of multiple processes.
High reliability design: redundant power supply and critical component backup, suitable for long-term continuous operation.
Modular architecture: supports adding or removing modules as needed to meet different process requirements.
Fast system integration: Through the SECS/GEM protocol, factory automation systems can be quickly integrated to achieve remote monitoring and data collection.
Typical Applications
Etch and CVD systems
Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) Systems
Ion implantation machine and wafer transfer system
Flat panel display (LCD/OLED) manufacturing equipment
AMAT Applied Materials 0090-06421控制器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
