AMAT Applied Materials 0225-33921控制器装置
1.产 品 资 料 介 绍：
核心规格
功能特点
典型应用
AMAT Applied Materials 0225-33921控制器装置 英文资料：
The AMAT Applied Materials 0225-33921 controller device is the central logic control unit of wafer manufacturing equipment. It adopts a modular design, integrates multi-channel I/O, real-time control, and high-speed communication functions, and can accurately coordinate the process, transmission, and detection flow of multi chamber systems.
Core specifications
Project specification remarks
Suitable for multi chamber devices such as Centura, Endura, Sym3, etc., supporting 200mm/300mm wafers
Control architecture real-time operating system (VxWorks) ensures timing accuracy and stability
Communication interfaces SECS/GEM, EtherNet, RS-485 support factory automation integration
I/O configuration with digital input/output and analog input/output expandable to hundreds of channels
Dual redundant 24 VDC power input supports hot swapping
Working temperature 0-40 ℃ requires air cooling or temperature controlled environment
Size standard 1U/2U rack mounted for easy installation and maintenance
Certification: SEMI S2, CE, UL comply with semiconductor industry safety standards
Features
Multi task parallel processing: capable of simultaneously managing etching PVD/CVD、 Process steps such as ion implantation.
Fault diagnosis and safety interlock: Real time monitoring of equipment status, automatic shutdown in case of abnormalities.
High reliability design: redundant power supply and critical component backup to reduce downtime risk.
Modular expansion: It can flexibly add or remove I/O modules to adapt to different process requirements.
Fast system integration: Supports SECS/GEM protocol and can quickly integrate into existing automated production lines.
Typical Applications
Etch and CVD systems
Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) Systems
Ion implantation machine and wafer transfer system
AMAT Applied Materials 0225-33921控制器装置 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
