AMAT Applied Materials 0010-70321开衩阀门

AMAT Applied Materials 0010-70321开衩阀门

1.产 品 资 料 介 绍：

核心规格

作用与价值

• 精确控制：毫秒级响应，确保气体输送的启停精准，避免交叉污染。
• 结构紧凑：占用空间小，便于集成到高密度腔室布局中。
• 高可靠性：采用耐腐蚀材料和高真空密封设计，适应恶劣工艺环境。
• 低维护：模块化设计，可在线更换执行器或阀瓣，减少停机时间。

AMAT Applied Materials 0010-70321开衩阀门 英文资料：

AMAT 0010-70321 slit valve (also known as open valve actuator door) is used for gas/vacuum pipeline switching and isolation in semiconductor equipment. It is commonly used in gas distribution, vacuum chambers, or delivery systems on platforms such as Centura, Endura, P5000, etc.

Core specifications

Project specifications/characteristics remarks

Type Pneumatic/Electric Operated Split Valve Non Manual

Applicable medium, process gas, vacuum, not suitable for highly corrosive liquids

Function to quickly cut off or conduct airflow, commonly used for multi-channel switching by switching air paths

Interface form: flange or sleeve connection compatible with standard equipment interface

Rotary or linear actuator compatible with ISO 5211 bracket

Material: 316L stainless steel, aluminum alloy, or engineering plastic. Some parts can be coated with Teflon

Sealing grade high vacuum level (10 ⁻⁶ Torr) meets semiconductor process requirements

Quick switching of action time in milliseconds to improve production efficiency

Function and Value

Precise control: millisecond level response ensures precise start stop of gas delivery and avoids cross contamination.

Compact structure: occupying small space, easy to integrate into high-density chamber layouts.

High reliability: Adopting corrosion-resistant materials and high vacuum sealing design, suitable for harsh process environments.

Low maintenance: Modular design allows for online replacement of actuators or valve discs, reducing downtime.

AMAT Applied Materials 0010-70321开衩阀门  产品展示      

 产品视频

3.其他产品

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ALSTOM LC105 控制器模块
GJR2365700R1010 控制器模块

4.其他英文产品

AMAT 0100-00389 Relay card
AMAT 0100-00046 Counter card
ABB SMI0-01C communication module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218