AMAT Applied Materials 0010-21740放大器
1.产 品 资 料 介 绍：
核心规格
功能特点
典型应用
安装与维护要点
AMAT Applied Materials 0010-21740放大器 英文资料：
AMAT 0010-21740 is a thermocouple (TC) signal amplifier module designed specifically for 300mm wafer process equipment, used in temperature closed-loop control systems for platforms such as Centura, Endura, P5000, etc.
Core specifications
Project specification remarks
Type: Thermocouple signal amplifier 4-20 mA or 0-10 V output
Automatic type recognition of input signals K, J, T, E, R, and S-type thermocouples
Output signal 4-20 mA or 0-10 V linear proportional output
Resolution 16 bit ADC accuracy ± 0.1 ℃
Sampling rate of 10 Hz meets the requirements of fast temperature control
Supply voltage 24 VDC ± 10% ripple ≤ 100 mV
Suitable for industrial environments with working temperatures ranging from 0 ℃ to 50 ℃
Isolation input output power three terminal isolation with strong anti-interference ability
Installation method: PCB board mounted, directly loaded into the equipment control board
Weight approximately 3.83 kg including casing and connectors
Features
High precision temperature measurement: Built in cold end compensation and linearization algorithm to ensure stable measurement across the entire range.
Multi type thermocouple compatibility: It can automatically identify and adapt to different types of thermocouples, reducing the number of spare parts.
Isolation design: effectively suppresses common mode interference and is suitable for complex electromagnetic environments.
Modular structure: easy to ｒｅｐｌａｃｅ online and shorten maintenance time.
Diagnostic function: Supports thermocouple open/short circuit detection to enhance system reliability.
Typical Applications
Temperature monitoring and control of process chamber
Temperature measurement of rapid heat treatment (RTP) system
Temperature feedback control of chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment
Temperature monitoring of heating elements in wafer transfer robots
Key points for installation and maintenance
install
Ensure that the amplifier is installed in a well ventilated location away from heating elements.
Thermocouple wires should be shielded and wired separately from power lines to avoid noise interference.
The power connection is firm and the grounding is reliable.
calibration
After initial use or replacement of components, zero and full-scale calibration is required.
Verify the accuracy of the output signal using a high-precision standard source.
AMAT Applied Materials 0010-21740放大器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
