AMAT Applied Materials 0190-70060磁铁驱动器

AMAT Applied Materials  0190-70060磁铁驱动器

1.产 品 资 料 介 绍：

核心规格

工作原理

应用场景

• 刻蚀工艺磁场控制：精确调节磁场强度与分布，优化等离子体密度与均匀性。
• 离子注入聚焦：控制磁透镜电流，提高离子束聚焦精度。
• 薄膜沉积均匀性优化：通过磁场调整改善膜厚均匀性。

AMAT Applied Materials  0190-70060磁铁驱动器  英文资料：

AMAT 0190-70060 is a dual channel high-precision magnet driver mainly used in semiconductor etching equipment (such as P5000, P5200, Centura, Endura) to control magnetic field strength and uniformity, ensuring stable plasma distribution. It controls the output current through a ± 10V analog signal, which can accurately adjust the electromagnetic field and optimize the etching rate and pattern accuracy.

Core specifications

Project Specification Description

Functional positioning: dual independent magnet drive, each can be individually controlled

Input signal ± 10V analog resolution of 12 bits, linearity ± 0.1%

Output current ± 25A continuous; ± 30A peak (10s) current ripple ≤ 100mA RMS

Power input AC 180~240V, 50/60Hz power ≤ 2.5kW

Protection functions include overcurrent, overheating, short circuit, overvoltage, and current deviation protection. Deviation alarm can prevent magnet burnout

Working temperature/humidity -10 ℃~60 ℃; ≤ 80% RH without condensation

Dimensions 235 × 190 × 172mm all steel shell, black spray painted

Weight 5.6kg (excluding bracket)

Installation method: Base fixed hole installation

working principle

The driver receives a ± 10V control signal from the upper computer, and after high-precision D/A conversion and current closed-loop control, outputs a stable ± 25A current to drive the electromagnet. Internally, intelligent power module (IPM) is used, integrating overcurrent, overheating, and short circuit protection to ensure rapid output shutdown in case of abnormal conditions and prevent equipment damage. The newly added current deviation protection function can monitor the deviation between the output current and the given value in real time. If it exceeds the threshold, an alarm will be triggered and the machine will be shut down to avoid a decrease in etching uniformity or equipment damage caused by magnet failure.

 AMAT Applied Materials 0190-70060磁铁驱动器  产品展示      

 产品视频

3.其他产品

WOODWARD 8290-044 速度控制模块
KONGSBERG RHUB200-5 集线器模块
GE IS200ESYSH1AAA 伺服终端电路板

4.其他英文产品

KEBA IP706 Extensible modules
IS200PMCIH1ABA Gas turbine module
IS215UCVEH2AB Gas turbine module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218