AMAT Applied Materials 0010-09093电源供应电池
1.产 品 资 料 介 绍:
- 主电源中断应急场景:在光刻、离子注入等高精度工艺设备中,当工厂电网波动或主电源故障时,该电池可在 50ms 内完成供电切换,保障晶圆传输机械臂的定位精度(偏差≤0.01mm),避免晶圆碰撞损坏。
- 设备维护断电场景:在设备日常维护需断开主电源时,电池可为设备控制系统的参数存储模块供电,防止工艺配方、设备校准数据等关键信息丢失,减少维护后设备重启调试时间(缩短至 30 分钟以内)。
- 洁净室特殊环境场景:电池外壳采用阻燃 ABS 材料(阻燃等级 UL94 V - 0),表面经防静电处理(表面电阻 10⁶ - 10⁹Ω),可耐受洁净室中 75% 酒精的定期擦拭消毒,符合 ISO 5 级洁净室的颗粒控制要求(每立方英尺>0.5μm 颗粒<100 个)。
AMAT Applied Materials 0010-09093电源供应电池 英文资料:
1、 Product positioning and core values
AMAT 0010-09093 power supply battery is an emergency power supply component dedicated to Applied Materials semiconductor equipment, mainly providing uninterrupted power support for critical control systems such as chamber pressure monitoring modules and wafer transfer positioning systems. In the semiconductor production process, when the main power supply system suddenly interrupts, the battery can quickly switch power supply modes to avoid equipment data loss, process interruption, and wafer damage caused by power outages. It is the "backup energy core" that ensures the continuous and stable operation of semiconductor equipment and reduces production risks.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
Special emergency power module for semiconductor equipment, compatible with seamless integration requirements of AMAT equipment power management system
Installation and positioning
The independent power supply compartment inside the equipment electrical cabinet should be at least 30mm away from the main power module and should be kept away from high-temperature heating components (such as power resistors)
Core functions
Emergency power supply, power monitoring, charge and discharge protection, supporting continuous power supply for critical systems for ≥ 4 hours after the main power supply is interrupted
Battery type
Lithium ion battery (Li Ion), using high-capacity cell combination (single cell capacity ≥ 2000mAh), no memory effect
Electrical performance
Rated voltage 14.8V, rated capacity 10Ah, maximum discharge current 5A, charging time ≤ 3 hours (0-100% power)
Protection mechanism
Built in overcharge protection (upper limit of charging voltage 16.8V), overdischarge protection (lower limit of discharging voltage 10.8V), overcurrent protection (short circuit current ≤ 20A), and temperature protection (working temperature -10 ℃ to 55 ℃)
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
Emergency scenario of main power interruption: In high-precision process equipment such as photolithography and ion implantation, when the factory power grid fluctuates or the main power supply fails, the battery can complete power switching within 50ms, ensuring the positioning accuracy of the wafer transfer robotic arm (deviation ≤ 0.01mm) and avoiding wafer collision damage.
Equipment maintenance power-off scenario: When the main power supply needs to be disconnected for daily maintenance of the equipment, the battery can supply power to the parameter storage module of the equipment control system, preventing the loss of key information such as process formulas and equipment calibration data, and reducing the equipment restart and debugging time after maintenance (shortened to less than 30 minutes).
Special environmental scenario of clean room: The battery casing is made of flame-retardant ABS material (flame retardant grade UL94 V-0), and the surface has undergone anti-static treatment (surface resistance 10 ⁶ -10 ⁹ Ω). It can withstand regular wiping and disinfection with 75% alcohol in the clean room and meets the particle control requirements of ISO Class 5 clean rooms (>0.5 μ m particles<100 per cubic foot).
AMAT Applied Materials 0010-09093电源供应电池 产品展示
产品视频
3.其他产品
Toshiba AIGW01G015 逻辑控制器模块
Kongsberg 6200455 控制器模块
ABB RTU560 560CMD11 通信单元
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218